Used AMAT / APPLIED MATERIALS Centura 5200 #293685998 for sale
URL successfully copied!
Tap to zoom
ID: 293685998
Wafer Size: 6"
Vintage: 1994
System, 6"
(3) Chambers
Oxide chamber for EMXP+, 6"
HP Robot
Gas panel: VME1/VME2
MFC/Gas filter missing
Gas box
Load lock
Simple cathode and ESC
Wall and cathode liner
SEIKO SEIKI 301
HV Module
RF Match box
ENI OEM 12B-03
Gas panel valve
VME1 Gas control
EOP Controller (3-channels)
Removed parts:
Generator
Pump
1994 vintage.
AMAT / APPLIED MATERIALS Centura 5200 is a high performance reaction chamber specifically designed for delivering precise process results in the semiconductor manufacturing industry. It features a novel automated top-load approach which enables ultra-high quality etch and deposition processes. The equipment offers a variety of advantages in terms of cost, speed and precision, making it ideal for customers across a broad spectrum of key manufacturing processes. At the heart of AMAT Centura 5200 is a unique dual-pumped vacuum system with an on-board gas manager. This advanced unit provides near-perfect pressure control and enables it to provide highly consistent etch and deposition performance while reducing substrate damage or material ablation. Furthermore, its vacuum levels can be regulated to 99.7 % or better, eliminating the need for costly vacuum bake-outs and significantly improving equipment turn-over. The reaction chamber of APPLIED MATERIALS Centura 5200 is equipped with a custom-designed substrate socket which holds the wafer gently during processing. This ensures that the wafer remains perfectly level and rotates at a pre-defined speed to ensure consistent etching and deposition effects. Additionally, the machine is built with a robust internal line filter which helps protect the chamber from dust, debris, and contaminants. The thorough control over the process parameters of Centura 5200 allows for maximum control over the lower profile (borderline) etch and deposition processes and exposure to elevated temperatures. This enables extremely captivating results and the highest quality. In addition to the hardware features, the tool is also equipped with sophisticated control and automation tools to ensure repeatable, cost-effective results. AMAT / APPLIED MATERIALS Centura 5200 is equipped for ultra-high quality etch and deposition processes, ensuring perfect execution every time. Its advanced vacuum asset and custom substrate socket creates uniform device structures, while its automated top-load approach, sophisticated control, and automation capabilities ensure that all process parameters are precisely tuned to deliver the highest quality results. All in all, AMAT Centura 5200 offers the perfect combination of precision and performance, making it an ideal choice for advanced semiconductor production processes.
There are no reviews yet