Used AMAT / APPLIED MATERIALS Centura 5200 #9181378 for sale
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AMAT / APPLIED MATERIALS Centura 5200 is a multi-chamber reactor designed for a range of production processes in the semiconductor industry, including etching, deposition, and ion implantation. The equipment is capable of processing up to 12 wafers simultaneously, providing efficient production rates. The 5200 has separate vacuum, inert gas, and chemical management systems for each process vessel. It also includes a physical vapor deposition (PVD), an Electron Cyclotron Resonance (ECR), and multiple electrostatic clamp (ESC) systems. The ESC allows the reactor to accurately control the plasma parameters, resulting in better etching and deposition results. The 5200 is designed with compatibility in mind, allowing operators to integrate it into any type of semiconductor processing system. Interfaces from AMAT Centura 5200 can be connected to the facility's computer, providing communication between the equipment and operators. This allows the operators to monitor multiple parameters simultaneously, providing improved process control and wafer yield. The 5200 also includes a graphical user interface that includes advanced alarms, which alert the operator to potential issues or problems. The 5200 is one of the most advanced reactors on the market today, and offers a variety of process benefits. It utilizes state-of-the-art plasma propulsion and uniformity technology, giving users higher throughput and process repeatability. The 5200 also features an advanced endpoint detection unit, which is designed to end etchings before they cause damage to the wafer. In addition, it features advanced gas control capabilities, including endgas flow modulation, ECR capabilities, and reactive gas mixing. The 5200 is designed to meet all applicable safety requirements, making it both reliable and safe. The machine is designed to be compliant with NFPA standards, including NFPA 85, NFPA 86, and NFPA 496. Additionally, safety features include a roll-back mechanism to eliminate over-etching, advanced travel monitoring, and advanced fault lockout configurations. APPLIED MATERIALS Centura 5200 is an ideal choice for the semiconductor processing industry due to its advanced technology and safety features. It provides users with the highest throughput and process repeatability available, as well as reliable, safe operation.
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