Used AMAT / APPLIED MATERIALS Centura 5200 #9401872 for sale
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ID: 9401872
Vintage: 1996
Dry etch cluster
(3) Process chambers
RF Supply cabinet containing
RFPP LF10A RF Supply
RFPP RF20R RF Supply
(3) ENO IEM-12B3 RF Generators
(4) BOC EDWARDS QDP80 Vacuum pumps
(2) BOC EDWARDS QDP40 Vacuum pumps
(3) NESLAB HX 150-CHX Recirculating chillers
NESLAB Steelhead 1 CHX recirculating chiller
Power supply: 208 V, 60 Hz, 139 kVA
1996 vintage.
AMAT / APPLIED MATERIALS Centura 5200 is a reactor designed for use in semiconductor process fabrication. It is specifically designed to support copper electrochemical deposition, copper chemical mechanical polishing, and copper electrochemical etch processes. The chamber has the capability to process wafers ranging in size from 150mm to 300mm. AMAT Centura 5200 features a robust platform offering optimized uniformity, repeatability, and unsurpassed equipment flexibility. Independent, low-drift, dynamic and static power supplies provide both precision and stability. Advanced electroplating chemistries, along with unique dual-electrode tuning and process monitoring strategies, provide superior pulse shape control to reduce variation and further improve uniformity. APPLIED MATERIALS Centura 5200 operates under a hot-walled design that facilitates advanced process development and optimizes performance. A modular tool kit also allows for process expansion and development as well as improved throughput. Centura 5200's fully automated gas delivery system and advanced two-stage scrubbing unit ensure superior gas-control consistency and accuracy. AMAT / APPLIED MATERIALS Centura 5200 also features an advanced process monitoring machine, the TELED® Tool, which includes an edge BIOS® image and process status database. This asset can quickly monitor recipe changes, drift values, model state and trends throughout all processes, providing comprehensive control from initial calibration to later maintenance and optimization. This superior control and flexibility positions AMAT Centura 5200 as an ideal solution for a variety of semiconductor process fabrication requirements. It is highly reliable, efficient and optimized for maximum precision, uniformity and speed. APPLIED MATERIALS Centura 5200 is a revolutionary semiconductor processing tool and a critical asset for semiconductor engineering.
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