Used AMAT / APPLIED MATERIALS Centura AP Enabler #293637141 for sale

AMAT / APPLIED MATERIALS Centura AP Enabler
ID: 293637141
Wafer Size: 12"
Dielectric etchers, 12".
AMAT / APPLIED MATERIALS Centura AP Enabler is an advanced reactor designed for the manufacture of semiconductors in a range of wafer production processes. This reactor combines high throughput, low pressure and excellent temperature uniformity to enable the highest yield of devices. It is the ideal tool for both low and high volume production processes. AMAT Centura AP Enabler uses an innovative reactor chamber design with a temperature range between -90° to +750°C. It has improved corrosion resistance and increased gas flow to help achieve higher uniformity in the chamber. It also features a low emissivity lining to help maintain the temperature uniformity and prevent oxidation. The reactor chamber is also heated by radio frequency, pulse heating and Radiant Heating Zones to provide efficient and even heating throughout the chamber. The AP Enabler features a Triple Level Design. This includes space constrained, full control of pressure, temperature and flow control allowing better recipe consistency, an improved workflow, and efficient scalability. APPLIED MATERIALS Centura AP Enabler has a barrier-less design for wafer handling, allowing for quick and efficient wafer loading/unloading, and thus reducing throughput time. The reactor utilizes gas distribution and storage system technology, which allows for complete process flexibility and control, and a variety of independent access ports for loading and unloading. This allows for the most efficient process engineering. The reactor also offers multiple substrate-processing solutions, including vacuum splitting, oxidation, diffusion, and low temperature chemical vapor deposition. Centura AP Enabler offers integrated process control and monitoring with a variety of sensors, enabling both online process monitoring and real-time process control. AMAT / APPLIED MATERIALS Centura AP Enabler has also been designed with simplified operator interfaces and automated operation. These features make it an ideal tool for making high quality, high yield semiconductor products.
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