Used AMAT / APPLIED MATERIALS Centura DPS G5 MESA #9383826 for sale

AMAT / APPLIED MATERIALS Centura DPS G5 MESA (Metal Etch Selective Area) is a highly advanced and versatile reactor platform designed for use in advanced etch and deposition processes. This reactor, which falls in the fifth generation of AMAT Centura DPS family of systems, offers significant and reliable performance advantages over earlier-generation reactors and has been tested and proven in the industry for years. AMAT Centura DPS G5 MESA reactor is built on a large bottomplate, allowing for wide process flows and versatile equipment flexibility. This reactor is also equipped with a variety of gas and fluid inlets and outlets that enable a variety of configurations suitable for various process requirements. The reactor also features a modular design with separate chambers for different process steps, as well as process modules that can be set up to work with either front-down or side-down wafer configurations. The reactor's design also includes an advanced and easy-to-use control system, which allows for many levels of automation and comes with a variety of process monitoring and logging tools. The user-friendly interface also allows for easy monitoring and tracking of critical unit parameters in order to ensure consistently reliable and repeatable processes. The reactor has an ultra-high low-energy plasma source, as well as wide RF delivery power levels, enabling it to deliver process times significantly faster than other systems in its class. In addition, the reactor's high-performance plasma source enables it to handle the most demanding processes, such as those involving high-temperature photoresist processes. The reactor also comes with several high-performance process end-point detection systems, including the industry-standard plasma emission detection machine (PED), eddy-current detection (ECD), and the high-sensitivity optical emission detection tool (OED). These end-point detection systems function to detect when a process step is complete and help prevent process variation or defect generation. Finally, APPLIED MATERIALS Centura DPS G5 MESA family of reactors also includes a range of support and maintenance options, such as process recipe generation and optimization services, on-site expert analysis and troubleshooting, and extended warranty and service programs. The reactor also complies with the highest industry safety standards for operation and maintenance, as well as for quality assurance and compliancy.