Used AMAT / APPLIED MATERIALS Centura DPS G5 #293817654 for sale

AMAT / APPLIED MATERIALS Centura DPS G5 reactor is a medium-volume production tool that is used to perform a variety of processes, such as oxide, nitride, and contact etch. This reactor utilizes a three-zone vertical Dual Frequency Inductively Coupled Plasma (DFPCP) source to provide uniform plasma and optimized etching performance. Its large chamber capacity accommodates multiple wafers and provides a large process window for the wafer's process and temperature uniformity. AMAT Centura DPS G5 is uniquely engineered with features to improve process yields and reduce defects. First, it utilizes a robust substrate exhaust equipment to reduce the chamber pressure to a level at which neutral gas diffusion is significantly reduced. This reduced off-normal diffusion helps ensure that the etching process is precise and uniform across the wafer surface. Additionally, the reactor is equipped with SmartMatch NF, a software-based feature that allows the user to create simulation-based process settings and quickly fine tune the process to increase yields. APPLIED MATERIALS Centura DPS G5 is designed with a multi-gas delivery system comprised of two Mass Flow Controllers (MFCs) that support up to four gas species for ideal process performance. The MFC's are equipped with proprietary controllers to reduce gas contamination and peak-skipping, providing better process stability and precise control of the process environment. An integrated wafer pre-clean unit with real-time user feedback also helps prevent particles and particles buildup. Centura DPS G5 reactor can be programmed to execute a variety of recipes that are customized for each process and its substrate materials. Utilizing the recipe-based Advanced Programing Tool, users are given full flexibility to program multiple recipes to accelerate throughput and optimize their production process. AMAT / APPLIED MATERIALS Centura DPS G5 also includes safety features and components that should be observed at all times to ensure safe operation. These features include an integral interlock machine that ensures that all components of the reactor are properly connected during operation. The chamber is also equipped with a thermocouple to continually monitor the chamber temperature. Additionally, the tool is equipped with a pressure transducer that maintains a controlled pressure in the chamber to ensure a consistent process environment and prevent contamination.