Used AMAT / APPLIED MATERIALS Centura DPS G5 #9352797 for sale
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ID: 9352797
Wafer Size: 12"
Vintage: 2011
Etcher, 12"
Mesa
(3) Poly chambers
Axiom chamber
2011 vintage.
AMAT / APPLIED MATERIALS Centura DPS G5 Reactor is a high-performance thermal processing equipment used for the deposition and etch of thin film structures. The reactor is designed for applications where process variability, uniformity, and repeatability are critical factors for success. The G5 utilizes proven technologies to deliver precise, repeatable, and reliable process results. AMAT Centura DPS G5 Reactor is designed to feature temperature control with digital temperature nominators for each chamber and a multi-zone, gas protected, special core thermal heat spreader capable of operating up to 1200 °C. High efficiency pumps and uniform etch distribution provide reliable processes conditions necessary for process repeatability and high yields. The reactor is equipped with an Auto-Clean feature that reduces maintenance through automated cleaning procedures. Industry-leading Deposition and Etch uniformity is achieved through high uniformity optics design for each plasma chamber, which prevents non-uniformities due to asymmetric plasma distribution from skewing process results. Each process chamber is equipped with either a conventional Faraday shield or magnetically shielded walls to maximize etch uniformity. The cross-chamber mixture delivery system is designed to provide highly repeatable process gases to ensure reproducible deposition geometries. APPLIED MATERIALS Centura DPS G5 Reactor features low-noise operation for all processing operations and maintains a narrow operating temperature envelope in order to keep emitted particles and contaminants at a minimum. The reactor is designed with safety in mind, featuring a one-gas-inlet and one-gas-outlet unit that is designed to contain explosive gases, an emergency stop button, a rapid emergency shutoff valve to instantly shut down the machine if a process-out-of-control condition is detected, and a temperature fusing tool to prevent overheating. Centura DPS G5 Reactor is an ideal choice for cutting-edge thermal processing applications that require accuracy and reliability. The reactor is able to consistently deliver excellent processing results thanks to its high-performance features, making it the ideal choice for any advanced thermal processing needs.
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