Used AMAT / APPLIED MATERIALS Centura DPS G5 #9379816 for sale

AMAT / APPLIED MATERIALS Centura DPS G5 is a state-of-the-art reactor intended for deposition, etching, and implantation of a wide variety of materials. It offers a robust modular design built upon the latest lithography and etching technology. This state-of-the-art reactor is well suited for semiconductor processing. The DPS G5 is framed around a tubular internal volume, which contains the chamber and the process gases. The chamber features a high-speed set of rotors fitted with a range of choice of ion beams. This feature present in the DPS G5 aids in targeting material with plasma and/or ion implantation, which decreases energy consumption. The range of ion beams includes oxygen ions and nitrogen ions, which are capable of implanting these materials into substrates for a wide range of applications, such as semiconductor device fabrication. The DPS G5 features a number of process control modules integrated into the system. These include a closed-cycle precipitation chamber, multiple vacuum pumps, and an automated mass-flow controller. With these inner control systems, the DPS G5 is able to precisely regulate the mass flow, pressure, and temperature of the process gases while achieving optimal control and repeatability. The reactor is capable of providing a high rate of rate of performance and a high rate of throughput. The DPS G5 features several insitu diagnostics, such as spectroscopy, process parameter measurement, and plasma control. This insitu diagnostics couple with an on-board automated process control for precise manipulation of the substrate's surface. AMAT Centura DPS G5 is also designed for ease of maintenance. The reactor contains multiple quick-replace tools and modules, making it easier to perform regular maintenance, such as the replacement of filters and knifes. Performance-wise, the DPS G5 is capable of etching, deposition, and implantation of a wide variety of materials, including metals, ceramics, plastics, and various semiconductor materials. It is capable of performing processes at high temperatures and pressures, as well as under ultra-high vacuum conditions. All in all, APPLIED MATERIALS Centura DPS G5 is an excellent choice for a wide range of material processing applications.