Used AMAT / APPLIED MATERIALS Centura DPS+ I #9116833 for sale
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AMAT / APPLIED MATERIALS Centura DPS+ I is a reactor designed for advanced semiconductor device fabrication. It is a high temperature, ultra-high vacuum thermal processing equipment that enables the fabrication of small, high-performance semiconductor devices. The system is designed to provide Ultra-High Vacuum (UHV) processing and uniform heating capability. AMAT Centura DPS+ I is a high temperature, ultra-high vacuum, thermal processing unit specifically designed for advanced semiconductor device fabrication. This is an industry standard tool for advanced process technologies. It offers solution for rapid temperature ramping, ultra-thin layer deposition, reflow and sintering of thin-film materials, and thermal processing of nanostructures and nanodevices. APPLIED MATERIALS Centura DPS+ I has a cross-beam architecture with two process chambers, a load lock chamber, and a separate cooling chamber. This architecture allows for optimized thermal processing. The load lock chamber provides process flexibility and improved machine throughput. The process chambers are vacuum sealed and capable of reaching down to 0.1 mbar temperatures. This low temperature range is important for processing less heat sensitive materials such as ultra-thin layers, especially when nanosize structures are involved. Centura DPS+ I is configured with an electron beam measuring tool (EBEAM) that provides real-time, in situ process monitoring. This allows better control and connection of process parameters, while also providing detailed data acquisition and data processing. The asset also offers features such as temperature tracking, rapid temperature ramping, pressure profile adjustment for optimal plasma processing, automated process control, and flexible process integration. AMAT / APPLIED MATERIALS Centura DPS+ I is designed with safety features to protect user and model integrity. This includes processes that protect against gas accumulation, provision of a temperature monitor, and maintenance of proper temperature levels for safe operation. Additionally, the equipment is equipped with protection devices, such as an overpressure safety valve, end-of-chamber balance valves, and power adjustment levers. Overall, AMAT Centura DPS+ I is a versatile and reliable system that can provide efficient and effective thermal processing for advanced semiconductor device fabrication. This unit offers reliable performance, precise process control, and improved machine throughput, allowing customers to achieve high yields and enhance device performance.
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