Used AMAT / APPLIED MATERIALS Centura DPS II Mesa T2 #9284376 for sale
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ID: 9284376
Wafer Size: 12"
Vintage: 2016
Etcher, 12"
(3) Poly chambers
Axiom chamber
2016 vintage.
AMAT / APPLIED MATERIALS Centura DPS II Mesa T2 is a semi-automated, production-class reactor designed specifically for semiconductor fabrication. It is an advanced multi-chamber equipment for performing photoresist, deposition, etching and surface treatment processes for device manufacturing. The system is composed of four individual process chambers, each capable of accommodating up to 12" diameter 200 mm wafer substrates. The unit is equipped with a dual stage robotic arm which allows for the insertion and removal of substrates from the chambers. This robot arm is complemented by a manual loadlock which can be used to load and unload wafers from their containers. AMAT Centura DPS II Mesa T2 also includes a rapid pressure control machine that gives each chamber the capability of achieving pressures of up to 8 Torr within a span of five minutes. Additionally, precision heater control throughout the tool can achieve temperatures within the range of 30 to 350 degrees Celsius. Furthermore, APPLIED MATERIALS Centura DPS II Mesa T2 has a sophisticated maintenance asset which helps operators identify recirculation errors in pumps, reduce the possibility of contamination, and simplify preventive maintenance. This model offers support to users with comprehensive diagnostic systems, full event logs, and onboard parts kits. Furthermore, the equipment allows operators to upgrade and monitor reactant makeup and process fits remotely. Finally, Centura DPS II Mesa T2 is compliant with industry standards such as SEMI E12 and SEMI S2. The system is designed to be cleanroom compatible and is equipped with a venting unit and an exhaust scrubber machine. Its small footprint allows for easy installation, and the tool can be custom configured to suit the customer's needs.
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