Used AMAT / APPLIED MATERIALS Centura DPS II #293754618 for sale

ID: 293754618
Poly dry etcher.
AMAT / APPLIED MATERIALS Centura DPS II is a high-grade reactor that can be used in a range of semiconductor production processes. It is a single-wafer process equipment that is capable of processing up to 200mm substrates for production of advanced semiconductor products. AMAT Centura DPS II is built around a multi-zone chamber and hot wall technology, which enables uniform and precise temperature and pressure control. This allows process recipes to be tuned for optimal performance in many challenging semiconductor fabrication processes. In addition, it also includes a powerful and flexible computer control system for precise process recipes implementation. The unit is designed for all etching applications which require excellent uniformity, high throughput and recipe-selected process conditions. The machine is perfectly suited for applications such as MEMS (microelectromechanical systems), photomasks, thin film transistors (TFTs), single-point diamond turning (SPDT) and small dielectric etch. The tool also includes an advanced PAM III (photoanalysis monitoring) asset, which offers automatic on-line real-time wafer photo-processing capabilities for production processes. This model is capable of providing customers with automated visual feedback for their process runs. APPLIED MATERIALS CENTURA DPS+ II reactor enables customers to maximize their production output by increased recipe-controlled process flexibility and throughput. It also offers the highest level of process repeatability and control. In addition, the equipment is fully qualified to meet industry standards for high reliability and system maintenance. Finally, the unit comes with a choice of integrated tools and options such as a temperature ramping feature, a high precision wafer chuck, and a LAM (laser ablation monitor) machine and offers high levels of process repeatability, reliability, and flexibility. Centura DPS II is an excellent choice for high-end semiconductor device fabrication applications.
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