Used AMAT / APPLIED MATERIALS Centura DPS II #293821495 for sale

AMAT / APPLIED MATERIALS Centura DPS II reactor is designed for high volume Polysilicon production. It is a fully automated process tool that features a 40-cm annealing chamber with advanced multiple-zone thermal uniformity technology. The process module capabilities include up to 600 cph with up to 3 modules in parallel. The tool also contains a low-temperature suite of recipes to increase productivity. AMAT Centura DPS II is equipped with a dual setpoint chamber temperature control equipment for precise control of the thermal conditions within the chamber. This feature can optimize the growth uniformity of the polysilicon films. The tool features advanced surface preparation processes, such as ion cleaning and hot-wall plasma deposition. It also includes a high-temperature dielectric solution that is designed to reduce the trapped charge in dielectric films and improve the process repeatability. APPLIED MATERIALS CENTURA DPS+ II employs a multi-step polysilicon deposition process, including an etch back step to remove the interface oxide layer, layer transfer and a uniform root growth step. The deposition process is controlled through an advanced real-time process control system. This unit is designed to optimize run-to-run and across-the-wafer uniformity by monitoring temperature and dose levels in-situ and adjusting parameters accordingly to compensate for any non-uniformity in the process results. APPLIED MATERIALS Centura DPS II includes an advanced end-point solution designed to increase the process control and throughput. This solution utilizes a combination of real-time end-point and deposition rate measurements to enable faster endpoint determination over longer time frames for accurate control of polysilicon thickness and smoothness. CENTURA DPS+ II reactor utilizes a 5-level safety machine for operator safety and protection. This tool ensures that the tool operates within its safety parameters and prevents any breach that could result in hazardous accidents. The reactor also includes a remote monitoring asset that operates 24/7 and notifies the operators of any irregularity within the process parameters. AMAT CENTURA DPS+ II is a fully automated machine that efficiently produces high-quality Polysilicon. Its advanced process control systems, uniformity technologies, and safety measures make it an ideal choice for high volume Polysilicon production.