Used AMAT / APPLIED MATERIALS Centura DPS II #9189889 for sale
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ID: 9189889
Wafer Size: 12"
Vintage: 2007
Poly etcher, 12"
(4) Chambers:
(3) DPS II
Poly
Axiom
Chamber configuration:
Chamber A:
Chamber model: DPS II
Bias generator: AE APEX 1513, 13.56 MHz, Maximum 1500 W
Bias match: AE, 13.56 MHz,3 kV navigat
Source generator: AE APEX 3013, 13.56 MHz, Maximum 3000 W
Source match: AE, 13.56 MHz,6kV navigat
Lid: Ceramic lid, dual gas nozzle
Turbo pump: EDWARDS STP-A3003CV
Throttle valve: VAT pendulum valve DN-320
FRC: MKS FRCA-52163310, 500/500 1/4VCR
ESC: Dual zone ceramic ESC
Endpoint type: EyeD IEP
Cathode chiller: SMC POU
Wall chiller: SMC INR-496-016C
Process kits coating: Anodize coating
Cooling: HT 200 / FC 40
Chamber B:
Cathode chiller: SMC POU
Chamber C:
Cathode chiller: SMC POU
Wall chiller: SMC INR-496-016C
Chamber D:
Chamber model: AXIOM
Source generator: 5000 W
Source match: AE match (RF System)
Throttle valve: Throttling gate valve
ESC: Pedestal heater
Mainframe configuration:
IPUP Type: ALCATEL A100L
Gas panel type: Standard
VHP Robot: Dual blade
MF PC type: CPCI
Factory interface configuration:
Frontend PC type: 306 Server
FIC PC type: 306 Server
(3) Load ports
Atmospheric robot: KAWASAKI Single fixed robot (A3 Type)
Side storage: Right / Left side
MFC Configuration
Chamber A:
Gas line Gas name Max flow MFC Type
Gas 1 CL2 300 DSPGD1XM
Gas 2 NF3 50 DSNGD1XM
Gas 3 SF6 100 DSPGD1XM
Gas 4 HBR 500 DSRGD1XM
Gas 5 N2 20 DSLGD1XM
Gas 6 N2 200 DSPGD1XM
Gas 7 O2 50 DSMGD1XM
Gas 8 O2 400 DSPGD1XM
Gas 9 HE 500 DSPGD1XM
Gas 10 CHF3 200 DSPGD1XM
Gas 11 CF4 300 DSRGD1XM
Gas 12 AR 500 DSPGD1XM
Chamber B:
Gas line Gas name Max flow MFC Type
Gas 1 CL2 300 DSPGD1XM
Gas 2 NF3 50 DSNGD1XM
Gas 3 SF6 100 DSPGD1XM
Gas 4 HBR 500 DSRGD1XM
Gas 5 N2 20 AALGD40W1
Gas 6 N2 200 DSPGD1XM
Gas 7 O2 50 DSMGD1XM
Gas 8 O2 400 DSPGD1XM
Gas 9 HE 500 DSPGD1XM
Gas 10 CHF3 200 DSPGD1XM
Gas 11 CF4 300 DSRGD1XM
Gas 12 AR 500 DSPGD1XM
Chamber C:
Gas line Gas name Max flow MFC Type
Gas 1 CL2 300 DSPGD1XM
Gas 2 NF3 50 DSNGD1XM
Gas 3 SF6 100 DSPGD1XM
Gas 4 HBR 500 DSRGD1XM
Gas 5 N2 20 AALGD40W1
Gas 6 N2 200 DSPGD1XM
Gas 7 O2 50 DSMGD1XM
Gas 8 O2 400 DSPGD1XM
Gas 9 HE 500 DSPGD1XM
Gas 10 CHF3 200 DSPGD1XM
Gas 11 CF4 300 DSRGD1XM
Gas 12 AR 500 DSPGD1XM
Chamber D:
Gas line Gas name Max flow MFC Type
Gas 5 N2 1000 DSSGD1XM
Gas 7 4%H2/N2 5000 DSVGD1XM
Gas 8 O2 10000 DSVGD1XM
2007 vintage.
AMAT / APPLIED MATERIALS Centura DPS II is an advanced process reactor equipment which can be used to carry out various processes for the production of a wide range of products from consumer electronics and automotive components to aerospace parts and medical devices. The system is designed to provide flexible and reliable processing capabilities, enabling a consistent and efficient management of production cycles. AMAT Centura DPS II uses high quality materials, such as stainless steel, to ensure a long lifespan. It is composed of 5 main components which are the reactor chamber, the feed cup, the tool cup, the exhaust flow control device and the drive control unit. The reactor chamber is designed to provide an optimal environment and temperature for chemical reactions, as well as providing an inert atmosphere to protect against corrosive vapours. The feed cup is equipped with a feed machine which is used to introduce raw materials into the tool for processing. The tool cup is used to house precision tools and accessories, which are necessary for the successful completion of processes. The exhaust flow control device is responsible for controlling the amount of gas and vapour which is released from the reactor chamber, ensuring that it is maintained at a safe level. Finally, the drive control asset is used to regulate the speed of the reactor's movement and to ensure precise temperature control. APPLIED MATERIALS CENTURA DPS+ II also contains many safety features which protect both operators and the model itself. These safety features include an emergency shut off switch, a pressure monitoring equipment, an oxygen monitoring system, and an inert gas monitoring unit. In addition, the machine's software is capable of displaying detailed diagnostics which help to quickly identify any faults or risks which may occur during operation. All in all, AMAT CENTURA DPS+ II is an advanced and reliable tool which is capable of performing a variety of processes for the production of products. Its robust design and comprehensive safety features make it an ideal choice for any manufacturing setup.
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