Used AMAT / APPLIED MATERIALS Centura DPS #293603772 for sale

AMAT / APPLIED MATERIALS Centura DPS (Deposition Process Equipment) reactor is an advanced semiconductor fabrication tool used in the deposition of thin films used in various semiconductor and other electronic products. The system is used to deposit high quality thin films onto wafers and other substrates with an excellent conformal coverage. This is done by delivering a process gas chemistries to the surface of the substrate at a specific flow rate and pressure. The ability to control the gas flow from the unit ensures that the correct gasflow shape is maintained throughout the process, resulting in a homogeneous deposition. The deposition process uses a pair of magnetrons for deposition. Both the wafer and the substrate holder move in unison on the x-y-z axes, with the wafer held in place by a vacuum chuck for stable wafer temperature. The wafer is then exposed to the process gas, which reacts to form the desired film. AMAT Centura DPS reactor is designed with power, gas, and fluid supply systems that ensure process parameters can be accurately controlled. APPLIED MATERIALS Centura DPS reactor achieves a high degree of repeatability within a batch, while providing a stable environment to achieve a desired film quality. The unit's inline automated quality control machine (AQC) monitors the substrate through the entire deposition process. This is done by measuring the wafer characteristics, such as reflectivity, overlay, thickness, and surface roughness. The AQC also offers additional benefits, such as automatic process optimization, film stress control, and automatic defect inspection and classification. Centura DPS reactor has a number of advantages over other deposition systems. This includes the ability to process a range of materials, such as organics and inorganics, and using the wafer itself for in-situ monitoring and process optimization. In addition, the reactor can be used for deposition of different kinds of films, such as metals, dielectrics, and insulators, as well as a range of geometric feature sizes. AMAT / APPLIED MATERIALS Centura DPS reactor is an ideal choice for semiconductor and other electronic product manufacturing.