Used AMAT / APPLIED MATERIALS Centura DPS #9096236 for sale
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ID: 9096236
Wafer Size: 1997
Poly system
(2) Chamber
Currently installed
1997 vintage.
AMAT / APPLIED MATERIALS Centura DPS reactor is one of the best and most reliable tools available for Chemical Vapor Deposition (CVD) and Atomic Layer Deposition (ALD). It is an advanced process equipment designed for full-scale production that enables users to develop advanced films with superior film properties and performance. The CVD reaction chamber of AMAT Centura DPS system is constructed from stainless steel and consists of two side-by-side, vertically-mounted quartz process tubes. Both tubes are surrounded by a vacuum environment and feature a total process area of up to 8.9 liters. A standard furnace unit is used to ensure that the temperature within the process chamber is accurately maintained. Each of the two process tubes contains a multi-zone susceptor that is incorporated into the quartz tube. The susceptor can be individually controlled to determine the temperature profile of the entire run. The gas delivery for APPLIED MATERIALS Centura DPS machine is managed through a fiber-optic, multi-zone gas delivery tool that ensures uniformity by allowing each zone its own rate of flow. The asset also features integrated deposition monitoring and control of temperature, pressure, and gas flows. This allows for greater accuracy during manufacturing and helps optimize uniformity. Additionally, Centura DPS utilizes a digital interface to allow for the remote management of model settings, parameters, and recipes. AMAT / APPLIED MATERIALS Centura DPS equipment is a robust and reliable tool for producing high-quality films with superior film properties and performance. Through careful design and use of advanced technologies, AMAT Centura DPS enables users to accurately produce films with excellent uniformity and reproducible performance. This system is an ideal choice for those looking to develop next-generation films with superior performance.
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