Used AMAT / APPLIED MATERIALS Centura DPS #9192739 for sale

AMAT / APPLIED MATERIALS Centura DPS is an advanced plasma dry strip reactor used in etching operations in the semiconductor and microelectronics industries. It is an next-generation version of the Centura Wafer Etch tool, providing higher throughput and greater accuracy than its predecessor. The DPS is suitable for a wide range of materials, including silicon, polysilicon, silicon nitride, silicon oxide, and aluminum. AMAT Centura DPS is a high-performance, high-throughput dry strip equipment capable of performing precision etching operations with a high degree of automation. The system incorporates advanced plasma technology, along with a multi-gas mixing chamber, to minimize damage caused by potentially harmful ionizing radiations. The DPS supports a range of gases, including hydrogen, oxygen, nitrogen, and other inert gases, depending on the material being processed. APPLIED MATERIALS Centura DPS is designed for fast and efficient etch operations. It starts with a pre-treatment cycle involving stream processing that applies a thin oxide film for improved oxide oxide selectivity. A second cycle is used for etching the oxide to the target depth. The numerous features of Centura DPS, such as its capacitively-coupled plasma (CCP) source and its fast stripping process, allow etching times of less than 5 seconds. This short etching cycle results in improved productivity and higher product yields. The unit also provides a variety of process control functions. This includes a real-time monitoring machine based on waveform analysis which enables precise control of the etch process. This allows for automatic detection and correction of any potential process problems, improving reliability. AMAT / APPLIED MATERIALS Centura DPS is an ideal tool for semiconductor manufacturer's looking for precision dry strip processing. With its advanced control systems, fast cycle times, and improved yields compared to the previous Centura Wafer Etch tool, AMAT Centura DPS is the perfect choice for any etching operation.