Used AMAT / APPLIED MATERIALS Centura DPS #9193142 for sale

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ID: 9193142
Poly R1 chamber DTCU Type: R1 DTCU Wafer type: SNNF ESC Type: Polymide Standard: Throttle valve Gate valve Cathode: Single type Turbo pump: LEYBOLD Mag 2000 Dual manometer: 627A / 625 A Missing Parts: Match box H/V Module Turbo controller.
AMAT / APPLIED MATERIALS Centura DPS is a reactive ion etch (RIE) and deposition equipment that is used in the fabrication of integrated circuits (ICs) and many other types of semiconductor devices. AMAT Centura DPS is designed to provide superior performance, worker safety, and ease of use for high-volume IC production. APPLIED MATERIALS Centura DPS is designed for the deposition or etching of many materials used in semiconductor fabrication, from metals to organics. It uses a combination of several process gases, fed into a process chamber, to achieve high-quality etching or deposition of these materials. The process gases include oxygen, nitrogen, argon, helium, and/or hydrogen chloride. The process chamber includes a powered top electrode, movable substrate table, and turbo pump used to evacuate the chamber. A plasma source that is located inside the chamber is used to generate the necessary ions for etching or depositing the material. Centura DPS is capable of delivering uniform etch and deposition results over the entire surface of the wafer, regardless of its size. It is also capable of operating over a wide range of pressures, temperatures, power levels, and timing cycles in order to achieve the desired etch or deposition results. Furthermore, the chamber is designed to help keep the environment clean and safe for workers, as gas diffusion and contamination are minimized. AMAT / APPLIED MATERIALS Centura DPS also employs a number of safeguards to protect workers from exposure to hazardous substances. Its multiple-level interlock system helps to ensure that automated process recipes stay within their parameters, minimizing the risk of product contamination and worker exposure to hazardous substances. The unit also includes an in-chamber monitoring machine that uses sensors and camera systems to record process data and ensure safety of the workers and equipment. AMAT Centura DPS is an extremely popular and reliable tool for IC production. Its ability to provide superior etching and deposition results combined with its high level of safety makes it an ideal choice for producing high-quality integrated circuits.
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