Used AMAT / APPLIED MATERIALS Centura DPS+ #9251498 for sale

AMAT / APPLIED MATERIALS Centura DPS+ is a state-of-the-art, versatile, horizontal single-wafer diffusion furnace with a fast wafer-loading system. It is designed especially for high-throughput production of multiple types of semiconductor devices manufactured using ion implantation, thermal oxidation, nitride deposition and other processes. AMAT Centura DPS+ has excellent uniformity and consistency, with wafer temperatures up to 1000°C, depending on the application. APPLIED MATERIALS CENTURA DPS+ features a wide-range of process control capabilities, including multiple-zone heating and cooling, chamber temperature control, vacuum control, gas flow control and independent control of individual hot-zones. To ensure accurate and repeatable processes, hot-zones and thermal regions can be calibrated using site-specific recipes and the pressure zones can be independently controlled with pressure sensors. Processes are monitored using a variety of analytical instruments such as thermocouples, including wafer probing and computer-based diagnostics. The furnace is capable of moving 100 wafers per hour with a transfer capability transfers, a high-powered input power supply of 200V, 8KW, and automated gas flow purge capabilities. The gas control system includes inert gas for purging and backfilling, as well as gas flow sensors for monitoring and controlling the gas mixed species. CENTURA DPS+ is equipped with multiple viewing ports and automated end of run wafer transfer. It also provides a low kV wafer-mounting platform for activating, or etching a mask for use in backside etch, as well as pre-clean etch processes. The furnace features an On-Furnace Wafer Curvature Sensor (OWCS), which allows for curvature compensation during run and a full wafer tracking process. Run temperature verification is accomplished using an infrared optical window situated at the front of the chamber. APPLIED MATERIALS Centura DPS+ can be configured with a range of advanced automation, monitoring, and control features, including process modules with in-situ metrology and end-of-run quality checks. Overall, AMAT CENTURA DPS+ is a reliable, accurate and cost-effective diffusion furnace that offers superior performance. It is an ideal choice for multiple types of semiconductor applications, as its powerful and flexible design ensures high-precision results.