Used AMAT / APPLIED MATERIALS Centura DPS #9255765 for sale
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ID: 9255765
Wafer Size: 12"
System, 12"
(4) Chambers (With pumps)
(2) Wafer transfer modules
Front end
Electronics cabinet
Etch clean AC rack.
AMAT / APPLIED MATERIALS Centura DPS Reactor is an advanced semiconductor processing equipment designed to enable cost-efficient and reliable production of next-gen semiconductor products. It features a vacuum chamber, universal substrate table, front end cassette load lock, automated load port, and programmable motion controllers, all designed to streamline production and minimize user time. AMAT Centura DPS eliminates the need for manual loading of wafers and substrates, reducing the exposure and handling of hazardous chemicals that are a traditional part of semiconductor processes. APPLIED MATERIALS Centura DPS is configured with a unique, 3-axis wafer transfer robot capable of precise positioning of substrates and components within the active chamber, allowing for maximum up-time. In addition to the in-situ process chambers, the system includes remote process chambers for pre-/post-treatment of substrates. The integrated process control unit allows for near real-time feedback, enabling precise processing parameters to be obtained and accurately maintained. Centura DPS is equipped with a high-resolution projection relative measuring machine that ensures process accuracy and repeatability across multiple runs. This sophisticated imaging tool also provides a layer-by-layer representation of feature characteristics to verify precise process conditions and outcomes. Capable of multiple process modes, including dry and wet etching, AMAT / APPLIED MATERIALS Centura DPS Reactor offers a broad processing window. In addition to etching, the asset can also be used for deposition and peeling applications. AMAT Centura DPS is designed with maintenance-friendly features, such as smart valves with quick disconnect capabilities, allowing for easier maintenance and shorter downtime. The reactor can be configured with a variety of chamber sizes, providing flexibility to meet the specific needs of each application. The compact size of APPLIED MATERIALS Centura DPS Reactor enables it to deliver high-quality performance in tight spaces, creating opportunities for manufacturers to operate systems where space is at a premium. This robust and reliable model provides high yields and consistent quality manufacturing, enabling companies to maximize their competitive specs.
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