Used AMAT / APPLIED MATERIALS Centura DPS #9398745 for sale
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ID: 9398745
Wafer Size: 8"
Vintage: 1995
Metal etcher, 8"
Wafer type: SNNF
Hard Disk Drive (HDD)
Floppy
CRT Screen
LLA/LLB: Wide body load lock with rotation
HP Robot
Chamber A: ASP+
Chamber C: Metal DPS R0
Chamber D: eMxP+
Chamber E: Single slot cool down
Chamber F: Orienter
Main AC rack
System controller rack
Power supply / Generator racks
Miscellaneous parts
Does not include:
Heat exchangers
Backing / Roughing pump
SSSCo PDS Solution
eMxP+ Process kit
eMxp+ ESC
1995 vintage.
AMAT / APPLIED MATERIALS Centura DPS (Dynamic Process Equipment) is a reactor designed to process wafers within an energy efficient and flexible platform, perfected for the manufacture of optoelectronic, microelectronic and hybrid materials. The system offers high throughput with large cluster tools, being able to process up to 28 wafers simultaneously. Using advanced control electronics, AMAT Centura DPS provides repeatable, accuracy and reliable performance with fast cycle times. It combines a high-aspect, multiple reaction chamber design with uniquely positioned quartz walls, ensuring uniformity in all deposition areas and providing superior process accuracy. APPLIED MATERIALS Centura DPS offers a wide range of process capabilities and parameters, enabling customers to obtain needed results quickly and cost effectively. The reactor consists of a low-mass, low-heat, high-efficiency manifold that delivers process gases, as well as a high-efficiency susceptor design for precise and repeatable wafer positioning. The unit contains Programmable Logic Controller (PLC) technology for automated operation, advanced graphical user interface (GUI) for ease of use, and integrated recipe and trending storage for maximum efficiency and quality. Centura DPS is compatible with a variety of substrate sizes and materials and offers excellent substrate uniformity through the use of uniform temperature control. The machine includes advanced automation and control capabilities, with a customizable program for nucleation and disassembly, as well as a multi-layered automated wafer handling tool. Additionally, AMAT / APPLIED MATERIALS Centura DPS offers quick asset startup and a wafer pollution-free environment. Overall, AMAT Centura DPS is a highly versatile model that is well-suited for manufacturing high-performance optoelectronic, microelectronic, and hybrid materials. The equipment boasts excellent levels of repeatability, accuracy, and wafer-to-wafer uniformity, making it ideal for precision applications. This advanced process is designed to optimize throughput, while minimizing cost, energy usage and time.
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