Used AMAT / APPLIED MATERIALS Centura eMax #9139787 for sale

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ID: 9139787
Dry etcher I Phase II Body MEMS line : 8” 2005 vintage.
AMAT / APPLIED MATERIALS Centura eMax is a high-performance reactor designed for high-quality processing of semiconductor ultrathin layered substrates. AMAT Centura eMax is equipped with advanced design features that help ensure the highest level of uniformity and performance in the fabrication and characterization of the deposited thin-film layers. APPLIED MATERIALS Centura eMax utilizes a PC-controlled, robotic- arm loading mechanism for operate in high vacuum environments and for safe and efficient loading of multiple pieces of semiconductor substrate into the system. This system has control over the substrate movement, the gas flows and selected process temperatures. The robot's capabilities provide the most reliable handling of delicate wafers and enable accurate placement for successful deposition of material onto the substrate. Centura eMax also includes several advanced processes. It can be configured with a Remote Plasma Enhanced Atomic Layer Deposition process (ALE Depositing) and also is compatible with other technologies such as Chemical Vapor Deposition (CVD). ALE depositing provides uniformity, repeatability and improved performance, as compared to traditional deposition processes. AMAT / APPLIED MATERIALS Centura eMax also enables users to specialize their substrate processing with a variety of film- stacks that ranges from simple metal-oxide layers up to complex substrates requiring <100 Angstrom multiple layers. The intrinsically safe design of AMAT Centura eMax incorporates automation capabilities to minimize operator intervention and provide a high degree of repeatability and accuracy in the deposited materials. Its efficient layout, combined with advanced monitoring, process control, and data collection capabilities, reduces downtime and increases operational efficiency. The chambers are designed for easy maintenance, inspection and de-contamination, and the integrated safety features make APPLIED MATERIALS Centura eMax very user friendly. Centura eMax is a robust, high-performance reactor for efficient and reliable substrate processing. Its advanced design features make it the perfect choice for applications requiring highest levels of uniformity and accuracy in the fabrication and characterization of ultrathin layered substrates. For the most advanced and highest quality semiconductor substrates, AMAT / APPLIED MATERIALS Centura eMax is the ideal system.
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