Used AMAT / APPLIED MATERIALS Centura Epi 300 #293831751 for sale

ID: 293831751
Wafer Size: 12"
Vintage: 2018
System, 12" Control architecture type: NON-HRTS / ECAT Chamber pyrometry High precision Loader unit type: FI 6.3 Thickness of intrinsic Si ≃16 for wafer/hour: 2.3 µm No of cassettes / chambers: (3) Load Ports (4) Chambers (2) Single Wafer Load Lock (SWLL) Gas boxes: Dual gas panel H2 leak detector CSG NPI: Nextgen GP (per Twin) Panel feed: Bottom Type: STEC Z700X VENTURI Purge pump Regulator Gas pallet Nextgen: Special process capability: XFLOW (2) Independent mixers 2018 vintage.
AMAT / APPLIED MATERIALS Centura Epi 300 is a state-of-the-art epitaxial reactor widely used in the semiconductor industry for the deposition of thin films on silicon wafers. Epitaxy is a key process in the manufacturing of advanced semiconductor devices, as it allows precise control over the crystal structure and thickness of the deposited layers, leading to improved electrical and optical properties. At its core, AMAT Centura Epi 300 is designed to provide high-throughput, high-quality epitaxial growth in a production environment. The equipment comprises several key components, including a reaction chamber, gas delivery system, temperature control unit, and process monitoring tools. These components work in tandem to create a controlled environment conducive to the deposition of uniform and defect-free epitaxial layers. One of the standout features of APPLIED MATERIALS Centura Epi 300 is its advanced gas delivery machine, which enables precise control over the flow rates and mixtures of precursor gases used in the epitaxial process. This level of control is essential for achieving the desired film properties and uniformity across the entire wafer surface. Additionally, the tool is equipped with multiple gas inlets and a showerhead assembly to ensure efficient gas distribution and mixing within the reaction chamber. Temperature control is another critical aspect of epitaxial growth, and Centura Epi 300 excels in this area with its advanced heating and cooling capabilities. The reactor is equipped with a high-temperature quartz wafer holder capable of reaching temperatures exceeding 1000°C, as well as a rapid thermal annealing (RTA) option for post-deposition processing. Precise temperature control is essential for controlling the growth rate, crystallinity, and doping profile of the epitaxial layers. In addition to precise gas delivery and temperature control, AMAT / APPLIED MATERIALS Centura Epi 300 features a range of process monitoring tools to ensure the quality and uniformity of the deposited films. These tools include in-situ ellipsometry for real-time thickness monitoring, mass spectrometry for gas analysis, and optical emission spectroscopy for endpoint detection. By constantly monitoring the process parameters and making real-time adjustments, the asset can maintain tight control over the epitaxial growth process. AMAT Centura Epi 300 is also known for its versatility and scalability, allowing semiconductor manufacturers to meet the evolving demands of the industry. The reactor can accommodate various substrate sizes, from small research samples to large production wafers, making it suitable for a wide range of applications. Moreover, the model can be easily integrated into existing semiconductor manufacturing lines, providing a seamless transition for companies looking to upgrade their epitaxial growth capabilities. Overall, APPLIED MATERIALS Centura Epi 300 epitaxial reactor represents a cutting-edge solution for advanced semiconductor manufacturing. With its advanced gas delivery equipment, precise temperature control, and comprehensive process monitoring capabilities, the system provides semiconductor manufacturers with the tools they need to achieve high-quality epitaxial layers for the production of next-generation semiconductor devices.
There are no reviews yet