Used AMAT / APPLIED MATERIALS Centura Epi #9157497 for sale

AMAT / APPLIED MATERIALS Centura Epi is a high-temperature processing tool typically used in the manufacture of microelectronics, optoelectronics, and MEMS devices. It is ideal for epitaxial deposition, diffusion, ion implantation, and other etching processes, due to its reliable performance, repeatability, and long-term stability. The tool utilizes a vertical hot wall, single-wafer reactor design with up to two chambers, allowing for multiple process steps such as pre-clean and/or epitaxial growth done within one equipment. The chambers are equipped with an RF power enclosure, a load lock, an exhaust plenum, and a quartz showerhead. A movable LN2 cooled lip separates the load-lock chamber from the deposition chamber, allowing for the introduction of substrate material. The process temperature range is from -150° C to 850° C, allowing for a wide range of operations. AMAT Centura Epi includes programmable controllers, allowing for process control parameters to be adjusted by the user. It can also be operated with a remote interface, allowing users to monitor and adjust processes while away from the machine. The system is designed with a contamination monitor that allows users to feed-back process parameters to ensure that the environment is clean. APPLIED MATERIALS Centura Epi can be used for a range of applications, including dielectric deposition and oxidation, silicon-on-insulator (SOI) production, deposition of barrier layers and low-k dielectrics, as well as shallow junction formation. It is optimal for use in the fabrication of integrated circuits, semiconductors, optoelectronics, MEMS, and other types of device applications. Centura Epi offers a variety of process options, such as batch processing, sequential processing, and inline processing. Batch processing involves loading a number of substrates onto the unit, processing them together, and then unloading them all at once. Sequential processing allows a single substrate to be processed at a time. Inline processing is used when processes are integrated into a production line and substrates are exposed to multiple processes. In addition, AMAT / APPLIED MATERIALS Centura Epi offers a customizable design, allowing users to integrate custom components into the machine and customize the tool to fit their specific needs. Its reliability, repeatability, and long-term stability make it a reliable and versatile tool for production of integrated circuits and other semiconductor devices.