Used AMAT / APPLIED MATERIALS Centura MxP #293750251 for sale
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ID: 293750251
Wafer Size: 8"
Vintage: 1996
Poly etcher, 8"
Orienter chamber: Hoop type: STD
Chamber wall flow sensor
Chamber cathode flow sensor
Chamber turbo pump flow sensor
No SMIF
EMO Switch type
EMO Guard ring
Chamber type:
Position A: Poly
Position B: Poly
Position F: Orienter
Load lock storage elevator:
Set stage mechanism: Up and down movement
Poly etch chamber:
Manometer type: 1 Torr
Throttling valve assy
Chamber O-rings: Viton
ENI OEM-12B RF Generator
BOC EDWARDS / SEIKO SEIKI STP-301 Turbo pump
BOC EDWARDS / SEIKO SEIKI Turbo pump controller
QUARTZ Endpoint window
Gas panel:
Gas panel doors: Solid
Top exhaust
No single line drop
Top single line drop gas line feed
SLD Fitting type: VCR
FUJIKIN Veriflow valve
MILLIPORE Ni 10 Ra Filter
AERA FC-780C Mass Flow Controller (MFC)
Gas configuration: Chamber A and B
Gas / Size
HBr / 100 SCCM
Cl2 / 100 SCCM
SF6 / 100 SCCM
CF4 / 50 SCCM
HeO2 / 10 SCCM
HeO2 / 100 SCCM
Power supply: 200/208 VAC, 60 Hz
1996 vintage.
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