Used AMAT / APPLIED MATERIALS Centura Polygen 300 #9055168 for sale

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ID: 9055168
Wafer Size: 12"
CVD chamber, 12" Remote plasma source: MKS Astex Astron 2L Main Dep. Manifold: N2 - Pump Purge N2 - 20.0 SLM H2 - 10.0 SLM 1% PH3 in 99% H2 - 100 sccm SIH4 - 500 sccm Clean Manifold: NF3 - 1.0 SLM AR - 6 SLM N2 - Pump Purge Bottom Purge Manifold: N2 - 20 SLM N2 - Heater Purge.
AMAT / APPLIED MATERIALS Centura Polygen 300 is a state-of-the-art reactor designed to process a variety of compounds used in the semiconductor industry. This reactor offers the highest quality results with the lowest temperature and lowest stress possible. AMAT Centura Polygen 300 is a unique reactor featuring a proprietary low-stress, low-temperature thermal treatment process that produces superior-quality deposition results, improved product yields, and optimized material quality. The equipment includes an intuitive graphical interface in a modular and ergonomic design that makes it easy to use and maintain. APPLIED MATERIALS Centura Polygen 300 is equipped with a 9-channel, low-temperature RF/Microwave plasma reactor that is capable of producing polysilicon, crystalline silicates, carbon, and other metal-siloxane films. This versatile system has a maximum temperature of 750°C with a temperature ramp rate of 1°C/sec and an internal pressure of up to 2 torr. The reactor is designed with a load-lock and multiple inlet/outlet ports for efficient chemical transport. Its unique hollow cathode induction source offers excellent homogeneity and uniformity, leading to better device performance, improved yields, and reduced costs. Centura Polygen 300 also has an advanced intelligent control unit and suite of safety features for maximum process protection. This machine uses real-time diagnostic feedback and monitoring to help optimize tool performance and ensure consistent results. It also offers an enhanced seal design for increased asset stability and a more robust vacuum model. The equipment also features humidity, temperature, and inert gas control, along with advanced peripheral support tools to support end-user requirements. AMAT / APPLIED MATERIALS Centura Polygen 300 is the perfect choice for the toughest process requirements. This system ensures maximum temperature uniformity, best wafers per hour processing rates, and superior film quality to enhance yields. This reactor is an ideal choice for high-performance electronics product fabrication, such as op-amps, integrated circuits, and complex devices.
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