Used AMAT / APPLIED MATERIALS Centura PVD #9266535 for sale
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ID: 9266535
Wafer Size: 8"
Vintage: 1996
Sputtering system, 8"
Chamber: GAMMA 2 TiN
1996 vintage.
AMAT / APPLIED MATERIALS Centura PVD is a physical vapor deposition (PVD) equipment designed specifically for the production of advanced electronic devices. The system is built to provide multiple process capability in a single chamber, with some models having five or more configuration options. It is an integrated reactor unit made up of a deposition source and a main chamber. The main chamber of AMAT Centura PVD machine is a vacuum tool, used to place a sample wafer into the asset. The chamber is maintained at a base pressure to allow for an even flow of material from the source wafers. The chamber also consists of an electrical feed-through that is used to power the elements of the model, such as the electron beam sources, the filament, and the chuck. APPLIED MATERIALS Centura PVD equipment is powered by a broad range of deposition sources. Preferably, this includes electron beam sources, which take laser energy from the filament and deposit it onto the wafer surface. The electron beam can be adjusted to vary the depth of penetration and selectivity of deposited material. Secondary deposition sources, including resistive and RF sources, can be employed to produce multilayer deposition. The substrate is held securely in the system via a vacuum chuck, which is mounted on an electronic manipulator arm. This enables the motion of the chuck during the cycle of operations, along with manual positioning between operations. Additionally, the chuck is equipped with an ion gauge, which gives accurate readings of the chamber pressure to ensure a high level of stability throughout the deposition process. Finally, the various sources and components of Centura PVD unit are complemented with a range of control software options and commands. This includes advanced user-interface systems for enhanced control over the machine, options for monitoring process parameters, and the ability to operate multiple systems from one remote interface. Overall, AMAT / APPLIED MATERIALS Centura PVD tool is a comprehensive asset suited for a variety of production environments. The model allows for a range of different deposition processes, ensuring quality and accuracy in production. Additionally, with customizable control software and advanced source options, users can gain greater control over their processes.
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