Used AMAT / APPLIED MATERIALS Centura RTP XE #9238004 for sale
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ID: 9238004
Wafer Size: 8"
Vintage: 1997
Rapid Thermal Processing (RTP) system, 8"
NBLL
(2) XE Chambers
ATM
Missing parts:
Serial isolate BD
OTF Center finder BD
Floppy driver
Hard disk drive
VGA Card
I/O Expansion card
(2) CRT Monitors
LL Door & Mapping kit
M/F Robot upper / Lower motor
OTF Emitter bank
SCR Driver panel cover
6-Wafer lift pins
(2) Edge rings
(2) Support cylinders
(2) Lift pin bellows
Lift pin cap
(2) SEKIDENKO Temperature controllers
Pumping line from chamber to isolation V/V
Chamber rotation vector controller and PCB kit
Loadlock dry pump
(6) Chamber ATM lid clamps
Damaged parts: (3) Color signal towers
1997 vintage.
AMAT / APPLIED MATERIALS Centura RTP XE is a feature-rich advanced reactor designed for critical process applications in the semiconductor and flat panel display industries. The XE model is comprised of an atmospheric pressure, high vacuum chamber combined with an advanced wafer process and temperature management equipment. This integrated system contains a number of features designed to optimize process efficiency and repeatability. The reactor chamber has an internal volume of 50 liters and is made of a resistive wall material to provide excellent thermal and radiant heat uniformity. The reactor includes dual-sided heating allowing for uniform process temperatures up to 1000˚C for extremely high throughput operations or for special applications requiring temperatures to 2000˚C. The XE is equipped with a nitrogen bypass option allowing for rapid purging of the chamber atmosphere with high-purity nitrogen or other gases. It also includes a wide variety of options for process control including a pressure monitor, process gas mixer, and gas flow safety monitor. The XE also includes an advanced wafer temperature management unit, allowing for maximum uniformity during both warm-up and process operations. The temperature management machine ensures consistency between substrates and throughout multiple process steps. The process automation tool of the XE is designed to increase throughput and protect primary path features such as wafer edge exclusion. It incorporates a number of safety features such as interlocks to prevent accidental openings, failure alarms, and a closed loop PID control asset. Together these features provide a high level of protection against unintentional radiation exposures. AMAT Centura RTP XE is an ideal tool for a variety of semiconductor and flat panel display applications. Its advanced wafer temperature management model, process automation capabilities, and broad set of optional features combine to provide an optimal tool for those engaged in critical operations.
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