Used AMAT / APPLIED MATERIALS Centura RTP XE+ #9282073 for sale
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AMAT / APPLIED MATERIALS Centura RTP XE+ is a tool for low-pressure, rapid thermal processing of semiconductor wafers. This reactor uses Rapid Thermal Cycling (RTC) to rapidly enable and disable design features within the wafer, allowing for the creation of high-performance semiconductor structures. The XE+ type is a metal-organic chemical vapor deposition (MOCVD) system that is designed to enable users to create complex designs using smaller feature sizes than earlier reactors. The XE+ reactor uses ultra-high purity C2-F6-PF6 gases not only to accurately create features, but also to create uniformity across multiple runs. The reactor's horizontally-mounted heat source and ultra-high quality gas delivery, coupled with an integrated temperature control system, allows it to reach unprecedented levels of precision, repeatability, and speed. This is achieved by the quartz-heated temperature zone that can maintain accurate temperatures up to 1000°C, and the indexing stages that move the wafers and the quartz drawers in a horizontal direction to achieve greater uniformity of temperature when cycling. This rapid and precise heating and cooling allows for sub-second thermal cycles, enabling low thermal budget processing. In terms of operation, the XE+ can process up to two 125mm wafers at once, and is completely automated with designers having control over all parameters within the reactor. The XE+ also has precision timing control, inert gas purging, and automated end point detection, further enhancing the accuracy and speed of the process. Additionally, the XE+ is equipped with a safety system that is enabled only when rear catch catch doors are closed and locked. All in all, AMAT Centura RTP XE+ is an incredible tool for performing rapid thermal processing on semiconductor wafers. Its robust design, precision control, and automated features, make it a genuine game changer for creating high-performance semiconductor designs.
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