Used AMAT / APPLIED MATERIALS Centura SiNgen #293748907 for sale

ID: 293748907
CVD System.
AMAT / APPLIED MATERIALS Centura SiNgen is a specialized tool used in the fields of AMAT development and semiconductor fabrication. It is a type of chemical vapor deposition (CVD) reactor designed to deposit thin layers of silicon nitride and silicon-containing compounds onto a substrate. AMAT Centura SiNgen offers a precise and reliable deposition solution with a uniform layer thickness distribution, exploiting the features of advanced precursors and chemistry, such as aerosol and thermal decomposition of silane and ammonia. APPLIED MATERIALS Centura SiNgen is comprised of four blocks. The first block is the 'process station', which contains the precursor chambers, and the control electronics for the heating and delivery system. The second block is the 'electrode block' which contains the impedance-matched RF generator and measurement circuit. The third block is a 'source block' which provides the gas supply and drain line connections, as well as a load lock station. It should also be mentioned that all components within the SiNgen are temperature controlled for optimal performance. The process station is connected to the electrode block via heating and cooling wires which are housed within an insulation chamber. This insulation chamber allows for rapid and uniform heating and cooling of the process chamber. The source block is connected to the electrode block, where it supplies the gas for the deposition process. All the components are connected to the process controller, which is part of the source block. Centura SiNgen has an array of adjustable parameters that can be manipulated in order to increase the film quality. These parameters include the number and concentration of the source and reactant gases, the temperature of the process chamber, as well as the deposition rate. This makes it possible to achieve specific film properties depending on the application that is being performed. AMAT / APPLIED MATERIALS Centura SiNgen is available in various sizes depending on the type and size of material that needs to be deposited. All components are also user-friendly and reliable and the tool is routinely maintained to ensure optimal performance. This makes AMAT Centura SiNgen an ideal tool for fabricating thin-film materials.
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