Used AMAT / APPLIED MATERIALS Centura Super-E #9252317 for sale
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ID: 9252317
Wafer Size: 8"
Vintage: 2000
Etcher, 8"
Install type: Thru-The-Wall (TTW)
Cassette interface:
(2) Narrow body load locks
Fast wafer mapping
Main tool:
Wafer handling robot
Signal lamp tower
Buffer lid open / Close assembly (Manual)
Wafer on blade sensor
Optical endpoint system
Chambers:
Ch-A, B, C, & D: Super-E oxide
Ch-E: Blank
Ch-F: Orienter
Chamber configuration:
EBARA 305W Turbo controller
EBARA ET300WS Turbo pump
Chamber: P/N 0010-39736 REV A
Electrostatic chuck
HERF Match
Slit liner door
Autobias
Chamber liner
Cathode
Gas box / Gas pallet:
Standard gas panel interface
MFCs: AERA FC-D980C
CO 300 SCCM
C4F8 20 SCCM (TYLAN FC-2900 On chamber C)
N2 20 SCCM
O2 100 SCCM
CF4 100 SCCM
CHF3 150 SCCM (TYLAN FC-2900 On chamber A)
ARS 200 SCCM (AERA FC-D980CS)
Gas connection
User interfaces:
Front side monitor and light pen base
System side monitor and light pen base
System controller:
Equipment rack: (4) ENI OEM-28B RF Generators (Ch-A/B/C/D)
Chillers included:
B/E AEROSPACE 1231-CCN-DI-001 Dual channel
ATS 1231-CCN-DI-001 Dual channel
Power supply: 208 VAC, 4-Wire, 3 Phase
CE Marked
2000 vintage.
AMAT / APPLIED MATERIALS Centura Super-E is a reaction equipment that combines superior temperature and process control with a sophisticated design for maximum efficiency and reliability. This reactor uses a closed loop recirculation system to maintain consistent temperatures within the vessel, while providing uniform and repeatable results. The heater unit is made from quartz, which is up to three times more durable and efficient than other materials. This quartz heater machine is electronically tunable and provides precise, flat temperature control over a wide range of set points. The heater tool is further enhanced by dense thermal insulation and recirculated thermal transport medium to reduce heat loss. The process chamber is designed to enable accurate volumes of reactant to be processed, ensuring consistent and repeatable results. The lid is made from high purity quartz and is designed with a unique process isolation capability that minimizes contact between process gases and the environment. The process chamber also contains a high efficiency gas scrubber that removes corrosive and hazardous byproducts from the process chamber. The standard installation includes a comprehensive suite of monitoring and safety features that monitor environmental conditions within the chamber. This includes real-time monitoring of process chemicals, pressure, and temperature for enhanced process safety. The asset also includes a specialized warning model that alerts operators to potential process issues, helping to prevent potential catastrophic incidents. AMAT Centura Super-E includes automated process control software that allows for seamless and accurate process control. This software allows for automated calibration of process and product parameters, for increased efficiency and process reliability. This versatile and durable reactor comes in a range of sizes and configurations to meet the needs of any production requirement. The equipment is designed to provide repeatable results in the shortest amount of time, with minimal maintenance required. This superior production reactor is ideal for complex and demanding production environments.
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