Used AMAT / APPLIED MATERIALS Centura Tectra #293675757 for sale
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ID: 293675757
Wafer Size: 8"
Vintage: 2001
MCVD System, 8"
Load lock: A, B
HE (Heat Exchanger): Steel head
HP+ Robot
Wide body
SMIF
Chambers:
Chamber A: Ti (Ti-xZ)
Chamber B: TiN (TiN-xZ）
Chamber D: RPC+
Chamber E: 8 Slot cooldown
Chamber F: Orienter
Buff
Gases:
Chamber A: N2, H2, Ar, Cl2, Ar (Cl2 diluted), Ar (bottom purge), Ticl4
Chamber B: N2, NH3, Ar, Cl2, N2 (Cl2 dilution), Ar (bottom purge), Ticl4-L, Ticl4-H
Chamber D: H2, He, Ar, NF3
Dry pumps:
EBARA AA70W Chamber A
KASHIYAMA SD600PV-31 Chamber B
EBARA AA70W Chamber D
EBARA AA40W Buff
EBARA AA40W Load lock
Gas scrubber:
SHINKO SEIKI SW-50 ASM Chamber A
SHINKO SEIKI SW-50 ASM Chamber B
SHINKO SEIKI SW-50 ASM Chamber D
SYSCON Rack
Gen rack
Monitor rack
Chiller
Regulator box
Gas supply unit
HOT N₂ Controller
2001 vintage.
AMAT / APPLIED MATERIALS Centura Tectra is a highly advanced and versatile reactor designed to meet the needs of various industries. The reactor is specifically designed to facilitate the deposition of materials for a wide range of tasks such as thin film deposition, reactants for surface modification, and other high-tech processes. It is made of ultra-high-density graphite, which gives it excellent thermal and electrical properties. The reactor features a vacuum thermal processing equipment that provides precise temperature and flow control, a circulation of gases around the process chamber, and an additional pumping system capable of creating high vacuum pressures for reactant deposition. The reactor also includes an advanced heating unit, a cooling machine, and a control tool that can regulate the temperature and flow of the process. Additionally, the reactor is equipped with a special level sensor that uses a capacitance-type match method to accurately measure the liquid level in the process chamber. For improved performance, the reactor comes with a full range of accessories such as sources of electrical energy, mechanical supports, feeders, accessories for the reactant delivery asset, and an exhaust model. AMAT Centura Tectra reactor also comes with a full range of safety features such as explosion-proof enclosures, overpressure protection valves, and warning systems. Its advanced control equipment ensures smooth and reliable operation, even during extreme operating conditions. APPLIED MATERIALS Centura Tectra is an effective solution for any project requiring a high-performance reactor. Its advanced design and features help to ensure reliable operation, precise temperature control, and improved safety and performance standards. Centura Tectra is a great choice for any process involving the thin film deposition of materials or surface modification.
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