Used AMAT / APPLIED MATERIALS Centura Ultima Plus #9070889 for sale
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ID: 9070889
Wafer Size: 8"
HDP Chamber, 8"
DCVD Centura 1.x
Currently still attached to tool
RF Generator racks are still connected to tool and chambers
SMC heat exchanger is disconnected but still in facility area
Includes:
Gas pallet
Gas lines
Chamber interconnects
Chamber umbilicals and HX
ETO rack.
AMAT / APPLIED MATERIALS Centura Ultima Plus is a revolutionary advanced deposition tool for use in the semiconductor manufacturing process. Designed for optimum efficiency and performance, this tool can produce a wide range of devices and structures at the atomic level. AMAT Centura Ultima Plus is equipped with a dual-beam source that provides excellent uniformity of film deposition while achieving excellent step coverage, product reliability, and reliability of final products. In addition, this tool provides superior AMAT uniformity by employing a PureFilm Process Control (PPPC) equipment, ultra-precise deposition control technology. APPLIED MATERIALS Centura Ultima Plus is powered by the advanced RockCliff™ platform, a unique multi-stage discrete deposition system. The tool utilizes multiple automated steps to produce uniform and accurate films over large areas. These automation steps include a specific simultaneous recirculation of the target species at each step point, which ensures uniform fluxes and uniform film coverage. Centura Ultima Plus also features a Process Control Unit (PCS) to manage the multiple steps of the deposition process. The PCS provides constant monitoring of the process variables and parameters to ensure optimal process execution. The machine allows for complete adjustment and control of the process parameters to achieve optimal performance for the specific deposition process. AMAT / APPLIED MATERIALS Centura Ultima Plus is equipped with a nanofabrication heat source that enables temperatures up to 1000°C. This high temperature is necessary to obtain optimal step coverage and uniformity. Additionally, AMAT Centura Ultima Plus is also equipped with a high-precision robotic arm to precisely control the motion of the wafer within the tool in order to ensure uniform coverage and reliable films. Overall, APPLIED MATERIALS Centura Ultima Plus is designed to meet the demanding requirements of deposition processes. Its advanced dual-beam source and high-precision robotic arm control enable superior performance and reliability while providing high throughput. This tool is an excellent solution for advanced semiconductor fabrication processes and can produce high-quality films and excellent step coverage.
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