Used AMAT / APPLIED MATERIALS Centura Ultima Plus #9158337 for sale
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ID: 9158337
Wafer Size: 8”
HDP Chamber, 8”
Includes:
Chamber interface parts
Gas pallet
QTY DESCRIPTION P/N
Upper chamber LID:
(1) RPS AX7670-02,06,16,19
(1) RPS Mount kit
(1) AL Gas line 0050-62134
(1) SiH4 Gas line 0050-46867
(1) Top heater 0035-00123
(1) Ceramic dome
(1) ALN Plate modification
(1) Balanced side match modification
(1) DTCU Modification
(1) Cap bank assy 0010-06403
(1) PLC Kit
(1) Ultima plus cover 0010-19262
(1) Top baffle 0200-01009
(0) Nozzles
(1) Top clean feed through 0040-86016
(1) Hinge assy
Lower chamber body:
(1) T/V Body 0020-18273
(1) Turbo throttle valve
(1) Turbo throttle Driver 0010-01369,19238
(1) Rough throttle valve 0010-09035
(1) Turbo isolation valve 3870-00117
(1) Fore line and gas line
(1) Bias match
(1) Ceramic collar 0200-18109
(1) Ceramic cover 0200-18081
(1) Cathode assy
(1) Cathode misc
(1) ESC Refurbish
(1) NC Gate valve 3870-00037
(2) RF Coaxial cable 0190-18062
(1) Ebara 1600 Turbo pump / Controller ET1600
(1) 1000 Torr manometer 1350-01131
(1) 50T Interlock switch 1270-01814 (E48W-H38)
(1) Chamber XDCR press .10-100TORR Ass'y 1320-01284 (CV7627A-05)
(1) Frorline XDCR press 10TORR Ass'y 1350-01285
(2) Gas spring 3780-02273
(1) Seal assy 3700-02320
(1) Throttle valve teflon ring 0200-18268
(1) Dual he manifold (4 Valve) 0050-40927
(1) DUAL IHC ASS'Y
(1) ORING
(1) Forline isolation valve 3870-02890 (KAV-150-P-10)
Main frame:
(1) Chamber pneumatic assy 0010-17301
(1) Chamber tray bd 0100-18062 or 18064/65
(1) Chamber tray kit 0242-01931
(1) AC Box kit 0242-70228
Generator:
(1) ENI Generator rack
(1) Seriplex bd 0190-35765/0190-35651
(1) Distribution bd 0100-18043
(1) Seriplex back plane 0190-09286
(1) Cardcage
Gas panel:
(1) Gas panel
(1) Gas panel refurbish
(1) Seriplex bd 0190-35653/0190-35762/0190-35651
(1) Distribution bd 0100-35124
(1) Seriplex back plane 0190-09286
(1) Cardcage
MISC:
(1) Clean, fitting, clamp
(1) Chamber frame
(1) MISC (GFCI, cable, accessory).
AMAT / APPLIED MATERIALS Centura Ultima Plus is a leading-edge etch and deposition reactor designed to be used in the fabrication of advanced semiconductor devices. This automated equipment offers superior performance, improved throughput, and greater uniformity than its predecessors. The reactor chamber is designed to be extremely vacuum-tight such that it can operate at base pressures of 5E-7 torr, with a capacity to reach pressures as low as 1E-8 torr. AMAT Centura Ultima Plus also offers a wide range of temperature settings, up to 900°C, and is compatible with a variety of etch and deposition gases, including hydrogen, chlorine, nitrogen, oxygen, and argon. This reactor's automated wafer handling system ensures that wafers are transferred safely and efficiently. It features both single-wafer and batch processing, enabling the operator to set up multiple etching processes sequentially. Single-wafer scanning capability allows for high-resolution control and processing of each wafer individually. APPLIED MATERIALS Centura Ultima Plus also offers a permanently installed dry vacuum pumping unit that provides reliable operations without the need for maintenance. The base vacuum pump also allows for ultra-fast pump-down times, enabling processing times that can be up to 90% faster than traditional etch and deposition processes. This reactor also offers a range of additional features designed to promote accuracy, safety and ease of operation. These include a liquid source recirculation and measurement machine, integrated filter and valve unit, and a programmable logic controller (PLC) and data-acquisition tool which enables users to monitor all reactor parameters and process data in real-time. Overall, Centura Ultima Plus is a highly efficient, automated etch and deposition reactor that provides superior process control and repeatable throughput. The unit is designed with safety and cost in mind, and provides the powerful features needed to support advanced semiconductor fabrication processes.
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