Used AMAT / APPLIED MATERIALS Centura Ultima #9078243 for sale

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ID: 9078243
Chamber.
AMAT / APPLIED MATERIALS Centura Ultima Reactor is a state-of-the-art advanced deposition equipment used in semiconductor processing. This equipment enables users to process a variety of thin-film materials, including dielectrics, metals and organics. The reactor is capable of delivering a wide range of process conditions, including temperatures of up to 1400°C, pressure up to 2 bar, and flows up to 5000 sccm of reactive gases. The reactor is equipped with a high-flow gas injection system, a multiplexed gas sensor unit and a closed-loop plasma power control machine. AMAT Centura Ultima Reactor has a crucible-type chamber with a central heated susceptor that supports a wide range of substrate sizes. The heated susceptor is designed to maintain uniformity during processing, ensuring thin-film uniformity across large wafer areas. The Cruiser-Lift Process Loader with rapid wafer transport tool provides fast and easy loading of substrates and cassette-to-cassette-handing for fast turnaround time. In addition, the Ultima Reactor is designed with a robotic arm for the loading and unloading of wafers and an encasement for the thin-film formation. APPLIED MATERIALS Centura Ultima Reactor is very versatile, able to process layer thickness ranging from 10nm to 1um and 2- to 200-nm-thick dielectrics. The reactor is also compatible with a range of materials, including Al, Al2O3 and TiN. This equipment has built-in asset controls and optimized process parameters, simplifying process development and repeatability. The Ultima Reactor is equipped with a high-resolution video process monitor that provides completely automated real-time in-situ monitoring of process steps and results. In addition, the Ultima Reactor is also equipped with built-in safety features that include automated shutdown, automated gas shut-off systems, and remote shut-off safety. To ensure reliable operation and high-quality results, the Ultima Reactor is designed for ease of maintenance and operation, with a modular design and easy access to components for maintenance and other standard processes. The Ultima Reactor also comes with an advanced operating software that is designed to optimize user-defined parameters. Centura Ultima Reactor leaves the user with high-performance process results and a high yield. It is a fast-cycling, highly precise, reliable and safe reactor that can easily produce high-quality films for a variety of semiconductor applications.
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