Used AMAT / APPLIED MATERIALS Centura WxZ #293749330 for sale

APPLIED MATERIALS Centura WxZ is a planetary-type single-wafer uniform etcher reactor that utilizes deep reactive ion etching (DRIE) technology. This type of etcher reactors is designed for deep-etching small features into thin-film layers on a single wafer. It uses fluorine- and chlorine-based gases in plasma-enhanced chemical vapor deposition process, creating a high-aspect-ratio profile on substrates of various materials without significantly altering the material's underlying structure. Centura WxZ is capable of etching substrates at high-throughput rates and realizes superior results that can decrease processing time. The reactor is equipped with a wide configurable range of cassette sizes, allowing for compatibility with multiple wafers and platforms, as well as improved safety and product-yield protection. APPLIED MATERIALS Centura WxZ includes a revolutionary design that simplifies the accessing of process-critical components and greatly reduces the time required for etching of an entire wafer. Its configurable design also allows for easy integration with existingAPPLIED MATERIALS systems, enabling faster upgrades and sharing of system data across platforms. Centura WxZ incorporates a variety of innovative technologies that can result in superior etch results. It is capable of producing uniform etching through the use of a special feature called the Self-Aligned Sidewall Shrink. This feature provides perfect sidewalls in a uniform etch profile. The reactor also features a directional shower-head collector that results in precise etch face separation and minimum edge-bias tolerances. APPLIED MATERIALS Centura WxZ is an ideal tool for uniform etching processes that preserve or enhance the initial structural and electrical properties of substrates. Through the use of high throughput rates and uniform etching, Centura WxZ is highly versatile and capable of satisfying the requirements of various single-wafer processes. The advanced design and innovative technologies incorporated into the reactor provide an enhanced level of safety and product-yield protection.