Used AMAT / APPLIED MATERIALS Centura WxZ #9273065 for sale
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ID: 9273065
Wafer Size: 8"
Vintage: 1997
WCVD System, 8"
(2) Chambers
LL Type: Narrow body
Chiller: AMAT 0 Heat Exchanger
1997 vintage.
AMAT / APPLIED MATERIALS Centura WxZ is an advanced oxide reactor system designed for power/logic/SRAM-embedded memory device fabrication. This reactor is used to provide a single-sided wafer process from initial wafer cleaning, film deposition (e.g. SiO2), and implantation. Utilizing an integrated transport system, AMAT Centura WxZ can perform multiple processes in a single chamber or move wafers between chambers for multi-chamber integration. This efficient system is capable of producing ultra-thin layers of oxide at an incredibly low deposition temperature. APPLIED MATERIALS Centura WxZ's Faraday Magnetron Sputter provides a uniform process over the entire wafer surface, making it possible to create structures as small as 30nm wide with incredible precision. Centura WxZ's modular design allows users to customize the reactor to meet their individual needs while maintaining a consistent process. Utilizing the modular components offers flexible integration with additional process steps such as metal deposition and atomic layer deposition. Other unique features include high throughput, low temperature processing, fast process times, and advanced control and data acquisition systems. AMAT / APPLIED MATERIALS Centura WxZ allows customers to employ a variety of process options depending on the specific application. These include cleaning, thermal oxidation, oxidizing and nitridizing anneals, rapid thermal anneal systems, post-implant anneals, and post-cleaning processes. AMAT Centura WxZ also comes with an advanced control package which provides an easy-to-use user interface and access to real-time programmable data. This data can be used to optimize process conditions and maintain process consistency. APPLIED MATERIALS Centura WxZ is a versatile, industry-leading reactor that offers superior performance in a space-saving environment. It combines high productivity, precise temperature control, and outstanding reliability to ensure high yields and reduced cost of ownership. With the increased efficiency and flexibility of Centura WxZ, device manufacturers can now produce integrated circuits at the highest yields.
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