Used AMAT / APPLIED MATERIALS CENTURA #293600348 for sale
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ID: 293600348
Vintage: 1997
Metal etcher
Mainframe
(2) DPS Chambers (Poly and metal)
(2) R2 Chambers
(2) ALCATEL / ADIXEN / PFEIFFER Transfer pump / loadlock pump
(3) BOC EDWARDS iH80 Dry pumps
(3) NESLAB HX-150 Chillers
HP Robot
Narrow body load locks
AC and generator rack
1997 vintage.
AMAT / APPLIED MATERIALS CENTURA Wafer Reactor (AMAT CENTURA) is a metal deposition tool designed to create complex wafer patterns in a wide variety of materials. The tool can be used to deposit materials such as gold, aluminum, titanium, chromium, and tungsten among many others. APPLIED MATERIALS CENTURA uses low-cost chemical vapor deposition (CVD) and chemical mechanical planarization (CMP) technologies to produce highly uniform, fine-feature metal structures. CENTURA utilizes a highly efficient total chamber design that enhances process capabilities including wafer rearrangement, wafer performance and chamber utilization. This efficient design features a Dual Cycle CVD equipment, which is capable of processing more wafers in less time. The Dual Cycle CVD can simultaneously process up to 16 wafers at a time, allowing for the multiple deposition of different materials simultaneously. In addition, the dual-track CMP module allows for increased throughput, enabling superior results in terms of uniformity, planarity and metallization. AMAT / APPLIED MATERIALS CENTURA provides an unprecedented level of flexibility and precision, allowing users to deposit, etch, and polish the most intricate details. The CVD system is equipped with an advanced on-wafer metrology unit to evaluate pattern features in real-time. This gives users unprecedented control over their process, and allows for accurate deposition parameters for highly detailed features. Additionally, AMAT CENTURA includes a dynamic temperature mapping feature to accurately map the temperature distribution of all essential process regions. In addition, APPLIED MATERIALS CENTURA is equipped with advanced safety features and a number of process tools which help optimize process conditions. The tool includes a 'sensor to safety' monitoring machine and pop up wafer vacuum for wafer removal. Other features of the tool include a particle detection asset, a vacuum pressure monitoring model and a highly reliable robotic arm for wafer handling. CENTURA offers excellent precision and repeatability, providing superior wafer surface uniformity. The tool can also be fully automated and integrated with other tools as part of a flexible manufacturing process. This flexibility allows users to integrate their process and control the overall production process. With its advanced features and intuitive operation, AMAT / APPLIED MATERIALS CENTURA is the ideal tool for the precise deposition and polishing of high-quality wafers.
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