Used AMAT / APPLIED MATERIALS CENTURA #293624204 for sale
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ID: 293624204
Wafer Size: 12"
Vintage: 2006
Etchers, 12"
EFEM
Process: Oxide
(5) AMAT Enabler
(3) Chamber enabler
(1) Generator rack
AC Rack (CVCF, UPS)
TM Module with VHP Robot
RF Rack (ENI B5005, GHW 50A)
Side storage
parts included
2006 vintage.
AMAT / APPLIED MATERIALS Centura Enabler is a chemical vapor deposition (CVD) reactor that is used for the fabrication of semiconductor integrated circuits. AMAT Centura Enabler is engineered to provide process flexibility and extremely advanced temperature control. It supports the most advanced CVD processes and materials, enabling extraordinary film uniformity as well as power and speed up performance. APPLIED MATERIALS Centura Enabler features a patented uniform deposition technique that facilitates conformal and complete coverage of extremely complex dielectric stacks. It has an advanced multi-zone temperature control system, allowing different temperatures in different zones of the reactor. This allows for superior film uniformity and control, as well as the capability to run multiple processes independently, at the same time. Centura Enabler has an innovative filtration system that filters out all process by-products, giving the highest levels of cleanliness and yield results. This is especially useful in achieving very thin layer deposition on the surface of a wafer. The filtration system is also designed to minimize the number of deposition precursors, resulting in enhanced production yields. AMAT / APPLIED MATERIALS Centura Enabler has been designed to be extremely reliable and to reduce downtime. It is constructed from high-grade stainless steel, providing superior corrosion resistance and making it suitable for the rigors of a high-volume production facility. It also provides easy access for maintenance and repairs, as well as built-in diagnostics systems that make troubleshooting simple. Overall, AMAT Centura Enabler is a top-of-the-line CVD reactor that provides advanced process flexibility, temperature control, and precision filtration capabilities. It is built to deliver superior results, and offers impressive reliability and maintainability.
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