Used AMAT / APPLIED MATERIALS CENTURA #293652600 for sale
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ID: 293652600
Vintage: 2015
System
Multi-station wafer handler
(4) DPN HT Chambers, 12"
AC and EQ Rack, 12"
(2) EDWARDS / AMAT IPUP2 Dry pump
RF Power signal generator
2015 vintage.
AMAT / APPLIED MATERIALS CENTURA is a high-throughput, multi-chamber process station used for processing photoresist or substrate material. It is used in many industries where precise processing is required, such as semiconductors, medical devices, thin-film coatings, and aeronautics. The station consists of an enclosed stainless steel housing and is outfitted with a table, or substrate stage, and four independent processing modules. Each module is outfitted with various controlling components and can contain a number of different types of equipment, ranging from pumps and injectors to reactors, mixers, and evaporators. The modules are programmable and can be configured for multiple processes, including deposition, etch, and clean. Each module is also equipped with safety shut-off valves, making it suitable for hazardous materials processing. AMAT CENTURA's table is designed for a variety of substrate sizes and can accommodate wafers of different shapes and materials, including quartz and silicon. The table also has an adjustable heater, and temperature control sensors, as well as a vacuum chuck for the secure grip of the substrate during the processing procedure. The wafer holder can be adjusted to accommodate different sizes of wafer. The table can be tilted to provide a range of angles of deposit and etch. To ensure uniformity of the substrate's surface, APPLIED MATERIALS CENTURA also has an adjustable rotation system. Each module contains a vacuum chamber and a vacuum pump system, as well as an inlet valve for the introduction of gases into the processing chamber. The inlet valve controls the flow and distribution of gas within the processing chamber, ensuring uniformity of the process. The gas distribution is monitored through pressure mapping within the chamber. The Vacuum Chamber is constructed of stainless steel and is lined with chemical-resistant ceramic, and creates a low-pressure, oxygen-free environment. This environment allows for a number of different processes, including deposition, etching, and cleaning. CENTURA also has the ability to integrate additional monitoring and control systems, such as X-ray tools or process gas analyzers. The station also has a Class 5 cleanroom feature, which is suitable for handling hazardous materials. Through the integration of advanced process monitoring, analysis tools, and automation, AMAT / APPLIED MATERIALS CENTURA is an efficient and highly versatile reactor for processing photoresist or substrate materials. Its combination of reliable components, high modularity, and low maintenance cost makes it a cost-effective solution for a variety of industries.
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