Used AMAT / APPLIED MATERIALS CENTURA #9040065 for sale

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AMAT / APPLIED MATERIALS CENTURA
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ID: 9040065
Oxide etch systems, 8", parts machine Includes Auto-tilt loadlock kit.
AMAT / APPLIED MATERIALS CENTURA (AMAT) is a reactor typically used in semiconductor fabrication processes. It is used in a variety of KLA-Tencor scanner configurations as well as research and development tools. This product is constructed as a vertical chamber reactor with a supported high-density plasma (HDP) chamber. AMAT CENTURA is equipped with two-stage isolated hot zone cells and a backside cold ring power supply equipment to provide uniform temperatures and distribute power over a larger area of the chamber. Its interior walls are coated with a molybdenum film to maximize etching efficiency. APPLIED MATERIALS CENTURA also features specialized etch applications, including deep anisotropic etching, and it is capable of etching both positive-tone and negative-tone resist materials. This is possible due to the plasma source power supplies, which are designed to accurately adjust the etch rate. Its chamber also has automated temperature compensation and temperature feedback control to ensure superior uniformity and accuracy during plasma etching. CENTURA reactor is powered by a relative low-frequency plasma source with a variety of gas regimes such as reactive ion etching (RIE), ion-assisted etching (IAE), ion beam etching, and plasma-enhanced chemical vapor deposition (PECVD). AMAT / APPLIED MATERIALS CENTURA is capable of chemically reacting and sputtering metal materials, making it a great tool for producing printable circuit boards. Additionally, this system has the flexibility to tune etch parameters easily and quickly to meet the dynamic needs of a particular application. AMAT CENTURA's design allows for the expansion of existing equipment platforms to meet higher production volumes and allows for process changes to be made on the fly to accommodate different application requirements. This flexibility allows for rapid changes with minimal downtime and increased throughputs. With APPLIED MATERIALS unit-configuration options, users can make modifications to the chamber for higher throughputs, lower etch rates, or even make changes to the process protocols for different materials. APPLIED MATERIALS CENTURA is a reliable and durable machine that comes with a range of safety features. The unit is housed in a stainless steel enclosure, and both the safety interlocks and adjustable gas manifold have been designed to reduce accident risks and protect personnel. The chamber walls are constructed of aluminum alloy and fitted with thermally-stable glass cover plates, and an exhaust blower is included to evacuate any hazardous wastes. CENTURA is a semiconductor reactor that offers a range of features that optimize etching performance, control accuracy, and increase overall efficiency. Its flexibility and durability serve as an excellent platform for a variety of applications that require accurate etching and sputtered metal sources. The tool also comes with a range of safety features, making it a safe and reliable tool.
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