Used AMAT / APPLIED MATERIALS CENTURA #9170825 for sale
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ID: 9170825
Wafer Size: 8"
Vintage: 2002
CVD System, 8"
(4) Chambers
Type: Microwave
WSIX Optima
Fab interface: Front panel and GEM MCC
Load lock option: NBLL With 90° tilt out
Standard wafer mapping
Wafer sensor: Wafer out of cassette sensor (NBLL only, includes cass present sensor)
Manual transfer Ch hoist
Robot type: HP
Robot blade type: Metal (CES)
Vacuum facilities: Back end
Chambers A, B, C and D:
Chamber type: WxZ
Chamber process: WCVD
Endpoint
Standard TV
Standard Lid
Chamber E:
Type: Orienter
Chamber F:
Type: Cool down
Multi-slot cool down
OPTIMA System controller
Power service: Top
Monitors: TTW
System robot: HP
Gas panel type: Seriplex
Gas panel enclosure, 29"
G.P Facilities: Bottom feed SL (CES)
G.P Exhaust: Top
Gas line filters: Mott
BROOKS 6256 MFC
Backside cooling: Chamber A, B, C and D
Clean type: Microwave
(2) EMO's Mainframes
(2) EMO's Controllers
MF Exhaust: Top
Power service: Top
MFC Gasses:
Position A:
Size / Type
500 / N2
2000 / H2
30 / SIH4
30 / WF6
150 / NF3
3000 / AR
3000 / AR
500 / H2
Position B:
Size / Type
500 / N2
2000 / H2
30 / SIH4
30 / WF6
150 / NF3
3000 / AR
3000 / AR
500 / H2
Position C:
Size / Type
500 / N2
2000 / H2
30 / SIH4
30 / WF6
150 / NF3
3000 / AR
3000 / AR
500 / H2
Position D:
Size / Type
500 / N2
2000 / H2
30 / SIH4
30 / WF6
150 / NF3
3000 / AR
3000 / AR
500 / H2
Missing parts:
SBC Board
VGA Board
Floppy Disk Drive (FDD)
Center find board
Chamber E encoder motor
Chamber lid cover (All chamber)
ORIENTE Interface board and CCD board
Power supply: AC 208 V, 3 Phase, 320 A, 60 Hz
2002 vintage.
AMAT/AMAT / APPLIED MATERIALS CENTURA reactor is a highly versatile and technologically advanced reactor for the fabrication of integrated circuits (ICs). It is specially designed for the improved production of very large scale integrated circuits (VLSIs) and other advanced process technologies. AMAT CENTURA reactor has a unique design that allows the user to incorporate a wide range of technologies into the assembly process. It is based on a modular architecture that utilizes a set of modular platform frames to customize the setup. This allows the user to quickly and accurately integrate multiple different process steps into the equipment. The system is extremely user friendly, allowing engineers to easily begin the fabrication process in a matter of minutes. It also provides a platform for process development and for prototyping new technologies. The core of the unit is an advanced multi-zone reactor that facilitates a wide range of processes. It is capable of performing dry etching, wet etching, deposition, and sputtering processes. The reactor's multiple thermal zones also allow for the integration of multiple manufacturing processes at different temperatures. The reactor also has a built in computer-controlled temperature controller so that each temperature zone can be accurately controlled. The machine also has several safety features designed in to ensure that the process is being carried out in a safe manner. It has a pressure service module with a nitrogen purging tool and safety valves designed to ensure that the pressure inside the reactor is within acceptable limits. In addition, the asset has a built in ion source and ion implanter. This allows the user to performs various ion implantation processes that are used to modify the electrical properties of the ICs being fabricated. The model also includes several automations options. This includes an automatic sampling and collection equipment, a safety panel to monitor the process, and an easy to use recipe system. In summary, APPLIED MATERIALS/APPLIED MATERIALS CENTURA reactor is a powerful, versatile, and technologically advanced unit for the fabrication of integrated circuits. Its unique design allows for the incorporation of multiple process steps and its safety features ensure that the machine is safe and reliable.
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