Used AMAT / APPLIED MATERIALS CENTURA #9187474 for sale
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ID: 9187474
Wafer Size: 12"
Vintage: 2001
Etch system, 12"
Rev.4
(2) Load locks
(2) Load ports
Front end
Chamber configuration:
Chamber 1:
APPLIED MATERIALS HART3 Deep trench chamber
Silicon etchers
Chamber 2:
APPLIED MATERIALS HART3 Deep trench chamber
Silicon etchers
Chamber 3:
APPLIED MATERIALS HART3 Deep trench chamber
Silicon etchers
Chamber 4:
APPLIED MATERIALS HART3 Deep trench chamber
Silicon etchers
Power requirements:
208 V
3 Phase
CE Marked
2001 vintage.
AMAT / APPLIED MATERIALS CENTURA is a type of reactor that is mainly used in semiconductor manufacturing. This particular type of reactor is designed to safely contain the high temperatures and pressures needed for certain processes, such as oxidation and diffusion. It is used mainly in the fabrication of silicon wafers and other components. AMAT CENTURA is a horizontal showerhead configuration reactor with the main components being an outer quartz tube, inner quartz tube, cooling fan and a substrate support. The outer quartz tube is enveloped by a stainless steel case, providing additional protection. The inner quartz tube contains the powder that is going to be oxidized or diffused. The substrate support is a quartz plate which is attached to the bottom of the showerhead configuration. It provides a platform on which the substrate can be placed and the applied powder is spread across the substrate. The cooling fan is then used to draw the applied powder away from the substrate, which keeps the process running smoothly and prevents any major heat build-up. APPLIED MATERIALS CENTURA is operated and monitored by a computer control system. This computer control system ensures the accuracy and precision of each process. It also keeps track of all the parameters that can influence or affect the output of the process. All of this data is stored in the computer's database, which makes it easier to analyze any potential issues or changes that need to be made. In conclusion, CENTURA is a specialized reactor used mainly in the semiconductor manufacturing industry. It is designed to safely contain the high temperatures and pressures needed for certain processes, such as oxidation and diffusion. It is operated and monitored by a computer control system which ensures accuracy and precision for all processes. AMAT / APPLIED MATERIALS CENTURA is a reliable and efficient tool for producing accurate and quality results in the semiconductor industry.
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