Used AMAT / APPLIED MATERIALS CENTURA #9288113 for sale

ID: 9288113
System.
AMAT / APPLIED MATERIALS CENTURA is a multi-chamber reactor specifically designed for semiconductor manufacturing. It is a two-story, cluster tool which provides both plasma etch and deposition processes in one machine. The process chambers are arranged in a "cluster" configuration that allows different processes to be run at the same time, enabling production at smaller features, greater throughput, and improved yields. AMAT CENTURA is equipped with advanced plasma etch and deposition technologies, which are tailored to meet specific customer requirements. Its plasma etch chamber is equipped with either the PlasmaCore or PECVD (Plasma Enhanced Chemical Vapor Deposition) processes, which can be optimized to maximize layer uniformity, throughput, and geometrical accuracy. In addition, APPLIED MATERIALS CENTURA also provides an added capability of on-the-fly carrier control during the etch process, which is essential in the production of advanced devices. The deposition chamber is primarily used for the deposition of thick layers of silicon oxides and doped oxides, however other deposition processes can also be managed on CENTURA. The deposition is performed using either the TEOS (Tetraethylorthosilicate) or the ALD (Atomic Layer Deposition) process, and can also be tailored to meet specific customer requirements. The deposition layer can range from 100 to 1000 angstroms and can be tuned to achieve higher process uniformities and yields. In addition to its capabilities as a deposition and etch reactor, AMAT / APPLIED MATERIALS CENTURA also offers some special features including an Advanced Photoresist Remover (APR) for removing etch residues, a Contamination Control System (CCS) for controlling the environment within the chamber, and an Automated Process Control (APC) that monitors and maintains process conditions. AMAT CENTURA is a highly versatile and efficient tool that is capable of producing device layers of extremely high quality with process yields that are significantly improved over traditional tools. Its high-precision deposition and etch capabilities coupled with its advanced contamination control system and automated process control ensures reliable and consistent results across a variety of application areas. As a result, APPLIED MATERIALS CENTURA is well-suited for production of high-frequency devices with the most advanced device architectures.
There are no reviews yet