Used AMAT / APPLIED MATERIALS CENTURA #9389470 for sale
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ID: 9389470
Vintage: 1999
Poly etcher
Platform type: ETCH Centura I_Phase 2
Load lock: WBLL Wi Auto rotation
HP Robot
Position A and B: Metal DPS+
Position C and D: ASP+
Position E: Fast cool down
Position F: Orienter
Cooling station type: Fast cool down
AC Rack type: 84 Inch AC rack
RF Rack type: 84 Inch AC rack
VME Gas box
EPD Mono-crometer
1999 vintage.
AMAT / APPLIED MATERIALS CENTURA reactor is a high performance, full-sized semiconductor processing equipment. It offers optimized thermal control and is designed to perform a variety of etching, deposition and other processing steps required during semiconductor fabrication. AMAT CENTURA features a chamber capable of holding multiple wafer loads, as well as load locks that contain up to four wafers each. It is equipped with a set of high-precision ion sources, plasma sources, and automated wafer transport mechanisms. The system also offers a comprehensive set of process control options, including chamber pressure, temperature, and gas flow rates, as well as power and frequency settings for the ion sources. APPLIED MATERIALS CENTURA reactor is powered by a 65W power supply, which is capable of delivering up to 100% power on demand. The unit is also equipped with a temperature control module and multiple sets of heaters, allowing for high precision and rapid thermal cycling of the processing chamber. The chamber is constructed of stainless steel, and is surrounded by a Teflon semiconductor gas safety shield. To maximize cleanliness and particle control, the machine also features automated high performance edge-weld purging and leak monitoring systems. CENTURA reactor is capable of performing a range of process steps, including oxide etching and deposition, nitride etching and deposition, advanced deposition processes such as CVD, PVD and PECVD, and frontside etch. Its advanced process control software allows users to precisely define process parameters and gas flows, monitor chamber pressures, and manage chamber cooldown times, all of which provide greater accuracy and process quality when compared to other systems. AMAT / APPLIED MATERIALS CENTURA reactor is a valuable addition to any semiconductor fabrication facility, providing the capabilities of a tool that offers high performance and precision. Its range of process steps, advanced process control and high temperatures offer the highest quality results, resulting in improved performance and output quality.
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