Used AMAT / APPLIED MATERIALS Chamber for P5000 #293621288 for sale

ID: 293621288
Wafer Size: 8"
8" Process: Nitride.
AMAT / APPLIED MATERIALS Chamber for P5000 is a versatile reactor designed for a wide range of materials deposition and etching applications. It features a large vacuum chamber, with a diameter of 18 inches and a length of 24 inches. The chamber can achieve a base pressure of less than 5.0 x 10-9 Torr, when paired with the appropriate pumping system. It is also equipped with an automated lift-off cap purging system, to minimize outgassing and improve processing results. AMAT P5000 Chamber is equipped with a process gas introduction system (PGIS) which provides up to three fully-controllable valves with independent flow controls and mixture valves. This allows for precise control over deposition and etching processes, enabling multiple process recipes for different materials and applications. The chamber also features electromagnetic (pulsed) plasma source and rapid computer-controlled plasma (RPC) systems, which can be used to create advanced plasma processes, while providing superior uniformity and process control. AMAT Chamber for P5000 is also equipped with multi-zone heating and cooling capabilities, allowing for tight process control. It includes multiple dual molybdenum heaters and quartz chamber walls for thermal stability, as well as cooling water ports to maintain chamber temperature during high-powered processes. The P5000 Chamber is designed for ease of maintenance and extended lifetime with minimal downtime. It includes a self-contained chamber monitor for monitoring deposition uniformity and process chamber functionality. The chamber also includes a range of safety features, such as a large external CCD viewport, an ion gauge, and numerous safety interlocks. By combining the advanced technology in APPLIED MATERIALS Chamber for P5000, with its wide range of process recipes and precision processing capabilities, it is an ideal choice for materials deposition and etching applications. With its well-designed structure, it ensures superior materials processing in an efficient and reliable manner.
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