Used AMAT / APPLIED MATERIALS Chamber for P5000 #293653986 for sale

AMAT P5000 Chamber is a semiconductor processing tool used to develop and manufacture advanced wafer-level devices. It is a polygonal plasma reactor capable of controlling high-power vacuum-level deposition processes. The P5000 Chamber offers advanced features including a large process chamber, excellent thermal control, uniform plasma distribution, and safe and efficient operation. The large interior chamber enables the process of large substrates, such as 300mm and 450mm wafers. Thermal control is provided by an innovative design, featuring individually isolated hot and cold plates that can also be electronically pre-conditioned to provide uniform substrate temperature. Uniform plasma distribution is ensured by a multi-zone magnetically enhanced RF chamber and a hi-density showerhead electrode. The P5000 Chamber divides the chamber space into five distinct zones to minimize the risk of substrate damage from contamination. It also features a new plasma line generator technology, allowing the chamber to maintain a homogenous plasma for a high throughput process. The chamber is also equipped with a full airlock system for reducing contamination levels, enabling efficient operation. The chamber is able to produce pure oxides, nitrides, carbides, and refractory metals. It is equipped with an octagonal plasma quartz source, an indium-imprinted inductively coupled plasma source, and an enhanced electron cyclotron resonance source, which provides the highest level of deposition precision. It is particularly suited for III-V devices, such as gallium arsenide, gallium nitride, and aluminum gallium arsenide (GaAs/GaN/AlGaAs). APPLIED MATERIALS P5000 Chamber is designed to provide a safe and reliable environment for high-precision device production and research. It combines a large process chamber with an intuitive user interface, advanced plasma and thermal control, and reliable contamination control. This ensures high-quality fabrication results in a cost-effective, efficient process.