Used AMAT / APPLIED MATERIALS Chamber for P5000 #9377276 for sale

AMAT / APPLIED MATERIALS Chamber for P5000
ID: 9377276
Wafer Size: 8"
Vintage: 1995
8" 1995 vintage.
AMAT/APPLIED MATERIALS P5000 Chamber is a process equipment work cell designed specifically to perform a variety of microfabrication processes. It is a robust, high-precision equipment designed for use in large potential applications such as nanolithography, nanomaterial growth and device prototyping. Its engineering and design features make it an ideal chamber for both complex, long-duration processes and high-throughput processes. AMAT / APPLIED MATERIALS P5000 Chamber is a vertical chamber which is equipped with a cryopump and a mechanical booster pump. It has a patented, dual-ring, unidirectional ICP source and a vacuum operating pressure range from rough to ultrahigh. Two ion bombardment ports and two Faraday shields are positioned on the upper and lower parts of the chamber. The chamber has a removable top lid for easy access to wafer-loading and the baseplate can be opened from either the top or the bottom. The entire chamber can be closed with a vertical sliding door which seals the chamber and its exterior environment. The chamber is highly configurable, offering various options for sample loading and unloading including manual, automated cassette-to-cassette exchange and in-situ substrate change systems. It can support a variety of gas systems such as multi-element-ion or mass-flow controllers or a single-gas storage system. Additionally, the P5000 Chamber includes an integrated in-vacuum unit controller (ISC) with a "smart" heating machine, which allows for the integration of laser ablation, rapid thermal annealing, and other high-temperature processing. The P5000 Chamber is designed for use with a wide variety of processes such as physical vapor deposition, sputtering, CVD, evaporation, etching, deposition, nanolithography, particle implantation, and more. The chamber's features, along with its construction and design, provide an environment that is ideal for high-volume processes. It also offers an extended service life, dependability, low maintenance costs, and a high overall quality hydrostatic bearing tool. AMAT APPLIED MATERIALS P5000 Chamber is an advanced, high-performance chamber designed for use in a variety of microfabrication processes. It offers exceptional efficiency, extended service life, a variety of configurations, and the ability to precisely control both process parameters and environmental conditions. As such, it is an ideal choice for applications requiring high precision results.
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