Used AMAT / APPLIED MATERIALS Chambers for Centura eMax #293664215 for sale
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ID: 293664215
Parts to be removed:
P/N / Description
3620-00273 / ALCATEL ACT 1300M / 1600M Turbo controller
3620-00182 / ALCATEL ATH 1600M Turbo pump
0190-22967 / Analog I/O boards.
AMAT Centura eMax is a chamber for processing wafers. It is a reliable and robust equipment that offers a wide range of process capability and repeatability. This chamber features a base pressure of 1.0 x 10-6 Torr, and can easily accomodate a large range of wafers from up to 8 inches in diameter. The eMax chamber consists of an aluminum base plate with an integrated wafer heater, a top plate, an escape port, and the electrostatic chuck. The power supply, temperature controller, and wafer loader and unloader are all part of the integrated system. The wafer heater provides a stable temperature for the wafer with a maximum of 250°C, allowing for a wide range of exotic processes. The eMax chamber utilizes a unique electrostatic chuck unit to provide an even, uniform application of electrostatic force across the wafer's surface. This allows for an exceptional level of uniformity and repeatability as it ensures that the wafer is securely held in place during the process. In addition, the machine also includes an automated gas delivery tool to provide precise control over the in-situ process environment. This ensures that the chamber is kept at the required temperature and pressure, and that the appropriate gas mixture is available for the process. The two-dimensional wafer centering asset ensures that the wafers are always centered during processing, ensuring wafer stability and maximum uniformity. The integrated dose controller provides fast and accurate dose measurement and control. Finally, the chamber is user-friendly and can easily be maintained. The advanced monitoring model and user interface make it simple to view real-time data and take corrective action when needed. The interface is also customizable so that it can be tailored to the user's individual needs. APPLIED MATERIALS Centura eMax chamber is a reliable and robust equipment for wafer processing. Its wide range of capabilities, its repeatability, and its ease of use make it an ideal system for any application.
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