Used AMAT / APPLIED MATERIALS Enabler #9093619 for sale
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AMAT / APPLIED MATERIALS Enabler is a specialized reactor that is designed to enable fabrication of advanced semiconductor materials. It provides the environmental control, process flexibility, and throughput capability needed to meet the industry's most demanding challenges, including high temperature deposition and etching. AMAT Enabler consists of an integrated base chamber, a movable head which houses the material source and transportation systems, and key components necessary for process control. The chamber is designed to maximize throughput and maintain a controlled environment for a wide variety of processes. The extendable head allows for quick movement of the source between chambers, ensuring excellent uniformity over a wide area processing. The chamber also allows for high temperature deposition and etching. The system is designed to achieve temperatures of up to 800°C, allowing for high quality oxidation and nitridation processes for advanced materials. The high temperature capability also opens up the possibility for diamond-like carbon (DLC) and other nanocomposite films deposition on substrates. APPLIED MATERIALS Enabler is equipped with a pioneering energy hardware that controls wafer temperature and ensures the uniformity needed for high-performing devices. The wafers are heated using either an electron bombardment (EB) or a fast-cycle inductive heating system. Both systems are capable of providing fast thermal cycles, as well as reducing destabilizing effects caused by temperature gradients. Enabler also supports advanced process control software to ensure that all important parameters in the chamber are monitored and adjusted as needed during manufacturing. This software allows engineers to easily monitor and adjust the process parameters without making manual adjustments. AMAT / APPLIED MATERIALS Enabler is a fast and reliable reactor that helps create advanced semiconductor materials. Its integrated components, vast scope of applications, and superior control capabilities make it a well-rounded solution for semiconductor makers.
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