Used AMAT / APPLIED MATERIALS Endura 2 DSTTN #9204831 for sale
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AMAT / APPLIED MATERIALS Endura 2 DSTTN is a next-generation high temperature dual single wafer chemical vapor deposition (CVD) reactor. This system is built for optimum productivity, with features and capabilities that provide an ideal solution for advanced processes. AMAT Endura 2 DSTTN has a unique bottom convection design, yielding improved uniformity and increased process tolerance over more conventional top oriented designs. The Endura 2 is equipped with two independently programmable single wafer load locks, allowing one cassette to be unloaded while the other is being processed. This double-ended load lock increases throughput and enables efficient two-step processes. The Endura 2 also has a 'hot wall' furnance, which uses electric heaters embedded in the chamber walls to precisely deliver the heat required for deposition processes. The Endura 2 boasts an advanced wafer-to-wafer consistency, an excellent plasma uniformity, and a powerful process range. This system offers advanced process control, ensuring the highest levels of repeatability and reliability across the entire production range. It has proven to be particularly effective for high temperature processes such as silicide and titanium nitride CVD. The Endura 2 is also capable of handling a wide variety of substrates, from the traditional 300mm silicon wafers to new cutting-edge glass and metal substrates including GaN-on-Diamond and CaF2-on-Diamond. The unique dual single wafer design allows for individual control of both reactor halves, permitting custom processes for different substrate types. In addition, the Endura 2 has several added features that make its performance even more reliable. It is equipped with an additional HEPA-filtered airlock to further enhance chamber cleanliness, and it has an auto-calibration feature that automatically adjusts the E-beam to the process conditions. The Endura 2 also offers a modular design, allowing the user to easily upgrade components. All of these features combine to make the Endura 2 one of the most advanced high temperature CVD reactors on the market. With its user-friendly interface and intuitive software, the Endura 2 provides the ultimate solution for advanced deposition processes.
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